Pulsed arc deposition of super-hard amorphous carbon films

Applied Physics A: Materials Science and Processing

Volumn 78, Issue 5, 2004, Pages 675-679

  Schulz, H ^a   Scheibe, H J ^a   Siemroth, P ^a   Schultrich, B ^a  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; DEPOSITION; GRAPHITE; SUBSTRATES; VACUUM; WEAR RESISTANCE;

MATERIAL EROSION; SUBSTRATE TEMPERATURE; TEMPERATURE-SENSITIVE SUBSTRATE MATERIALS; VACUUM CHAMBERS;

AMORPHOUS FILMS;

EID: 17744383178     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-003-2280-8     Document Type: Article

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