Internal stresses in ta-C films deposited by pulse arc discharge method

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 1103-1108

  Inkin, V N ^a   Kirpilenko, G G ^a   Kolpakov, A J ^a  

^a Patinor Coatings Ltd   (Russian Federation)

Author keywords

Arc discharge method; Diamond like carbon; Floating potential; Stress

Indexed keywords

ADHESION; DEPOSITION; ELASTIC MODULI; GRAPHITE; MICROHARDNESS; RESIDUAL STRESSES;

COMPRESSION STRESS;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON;

EID: 0035270812     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00587-2     Document Type: Article

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