Thermal stress effects of Ge2Sb2Te5 phase change material: Irreversible modification with Ti adhesion layers and segregation of Te

Microelectronic Engineering

Volumn 85, Issue 12, 2008, Pages 2346-2349

  Chen, K N ^a   Cabral Jr , C ^a   Krusin Elbaum, L ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Ge2Sb2Te5; Phase change material; Stress; Ti

Indexed keywords

ADHESION; ATOMIC PHYSICS; ATOMS; BUOYANCY; EPITAXIAL GROWTH; GERMANIUM; LIFE CYCLE; PHASE INTERFACES; PHASE SEPARATION; SEGREGATION (METALLOGRAPHY); TELLURIUM COMPOUNDS;

ADHESION LAYERS; BINARY PHASES; CRYSTALLIZATION PROCESSES; GE2SB2TE5; IN CELLS; MATERIAL PROPERTIES; MEMORY CELLS; PHASE CHANGES; PHASE SEGREGATIONS; STRESS EVOLUTIONS; THERMAL ANNEAL; TI;

PHASE CHANGE MEMORY;

EID: 56649095817     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.09.009     Document Type: Article

References (17)

1. M. Gill, T. Lowrey, J. Park, in: Proceedings of the 2002 IEEE International Solid State Circuits Conference, vol. 2, IEEE, New York, 2002, p. 158.
2. K. Kim, G. Jeong, in: Proceedings of the 2005 IEEE International Solid State Circuits Conference, IEEE, New York, 2005, p. 576.
3. Ovshinsky S.R. Phys. Rev. Lett. 21 (1968) 1450
4. J. Non-Cryst. Solids 2 (1970) 99
5. Radaelli A., Pirovano A., Pellizzer F., Lacaita A.L., Ielmini D., and Bez R. IEEE Electron. Device Lett. 25 (2005) 684
6. Lankhorst M.H.R., Ketelaars B.W.S.M.M., and Wolters R.A.M. Nature Mater. 4 (2005) 347
7. Leevard Pederson T.P., Kalb J., Njoroge W.K., Wamwangi D., Wuttig M., and Spaepen F. Appl. Phys. Lett. 79 (2001) 3957
8. Krusin-Elbaum L., Cabral Jr. C., Chen K.N., Copel M., Abraham D.W., Reuter K.B., Rossnagel S., and Deline V. Appl. Phys. Lett. 90 (2007) 141902
9. Pirovano A., Lacaita A.L., Pellizzer F., Kostylev S., Benvenuto A., and Bez R. IEEE Trans. Electron. Devices 51 5 (2004) 714
10. S. Lai, in: Proceedings of the 2003 IEEE International Electron Devices Meeting, IEEE, New York, 2003, p. 255.
11. Cordes H., and Schmid-Fetzer R. J. Alloys Compd. 216 (1994) 197
12. Okamoto H. J. Phase Equilib. 17 4 (1996) 373
13. Suzuki A., and Wahlbeck P.G. J. Phys. Chem. 6 (1966) 1914
14. Ipser H., and Krachler R. Z. Metallkd. 84 9 (1993) 613
15. Alberici S.G., Zonca R., and Pashmakov B. Appl. Surf. Sci. 231-232 (2004) 821
16. Cabral Jr. C., Chen K.N., Krusin-Elbaum L., and Deline V. Appl. Phys. Lett. 90 (2007) 051908
17. Njoroge W.K., Woltgens H.-W., and Wuttig M. J. Vac. Sci. Technol. A 20 1 (2002) 230