The effects of Si incorporation on the thermal and tribological properties of DLC films deposited by PBII&D with bipolar pulses

Surface and Coatings Technology

Volumn 201, Issue 19-20 SPEC. ISS., 2007, Pages 8357-8361

  Choi, J ^a   Nakao, S ^a   Miyagawa, S ^a   Ikeyama, M ^a   Miyagawa, Y ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Bipolar type PBII D; Diamond like carbon film; Friction; Silicon incorporation; Thermal stability

Indexed keywords

BIPOLAR PULSE; PLASMA BASED ION IMPLANTATION AND DEPOSITION;

ANNEALING; CRACK INITIATION; FRICTION; ION IMPLANTATION; THERMODYNAMIC STABILITY; TRIBOLOGY; WEAR OF MATERIALS;

DIAMOND LIKE CARBON FILMS;

ANNEALING; CRACK INITIATION; DIAMOND LIKE CARBON FILMS; FRICTION; ION IMPLANTATION; THERMODYNAMIC STABILITY; TRIBOLOGY; WEAR OF MATERIALS;

EID: 34447527390     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.02.084     Document Type: Article

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