Observations of gas-phase nanoparticles during InGaN metal-organic chemical vapor deposition

Applied Physics Letters

Volumn 93, Issue 17, 2008, Pages

  Creighton, J Randall ^a   Coltrin, Michael E ^a   Figiel, Jeffrey J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INDUSTRIAL CHEMICALS; LIGHT SCATTERING; METALLIC COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NANOPARTICLES; NANOSTRUCTURED MATERIALS; ORGANIC CHEMICALS; ORGANIC COMPOUNDS; REFRACTION; SCATTERING; VAPORS;

ANGULAR DEPENDENCES; IN-SITU; LASER LIGHT SCATTERINGS; ORGANIC CHEMICAL VAPOR DEPOSITIONS; PARTICLE DENSITIES; PARTICLE DIAMETERS; SCATTERING INTENSITIES; SCATTERING PROFILES;

NANOSTRUCTURES;

EID: 55149093014     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3009291     Document Type: Article

References (24)

1. J. M. Phillips, M. E. Coltrin, M. H. Crawford, A. J. Fischer, M. R. Krames, R. Mueller-Mach, G. O. Mueller, Y. Ohno, L. E. S. Rohwer, J. A. Simmons, and J. Y. Tsao, Laser Photonics Rev. 1, 307 (2007).
2. C. J. Humphreys, MRS Bull. 33, 459 (2008).
3. T. Matsuoka, N. Yoshimoto, T. Sasaki, and A. Katsui, J. Electron. Mater. 21, 157 (1992).
4. I. Akasaki and H. Amano, J. Cryst. Growth 146, 455 (1995).
5. S. Keller, B. P. Keller, D. Kapolnek, U. K. Mishra, S. P. DenBaars, I. K. Shmagin, R. M. Kolbas, and S. Krishnankutty, J. Cryst. Growth 170, 349 (1997).
6. R. A. Talalaev, E. V. Yakovlev, S. Yu. Karpov, Yu. N. Makarov, O. Schoen, M. Heuken, G. Strauch, and H. Juergensen, MRS Internet J. Nitride Semicond. Res. 4, 5 (1999).
7. J. R. Creighton, D. D. Koleske, M. J. Russell, and A. J. Fischer, Sandia National Laboratories Report No. SAND2005-5946P/2005.
8. E. L. Piner, M. K. Behbehani, N. A. El-Masry, F. G. McIntosh, J. C. Roberts, K. S. Boutros, and S. M. Bedair, Appl. Phys. Lett. 70, 461 (1997).
9. F. Jiang, R.-V. Wang, A. Munkholm, S. K. Steiffer, G. B. Stephenson, P. H. Fuoss, K. Latifi, and C. Thompson, Appl. Phys. Lett. 89, 161915 (2006).
10. J. Ou, Y.-C. Pan, W.-H. Lee, C.-K. Shu, H.-C. Lin, M.-C. Lee, W.-H. Chen, C.-I. Chiang, H. Chang, and W.-K. Chen, Jpn. J. Appl. Phys., Part 1 38, 4958 (1999).
11. Y. Kangawa, T. Ito, Y. Kumagai, and A. Koukitu, Appl. Surf. Sci. 216, 453 (2003).
12. J. Leitnera, J. Stejskalb, and P. Vonkac, J. Cryst. Growth 267, 8 (2004).
13. D. M. Wood and A. Zunger, Phys. Rev. B 38, 12756 (1988).
14. T. G. Mihopoulos, V. Gupta, and K. F. Jensen, J. Cryst. Growth 195, 733 (1998).
15. J. R. Creighton, M. E. Coltrin, and W. G. Breiland, Proc.-Electrochem. Soc. 2002-3, 28 (2002).
16. J. R. Creighton, W. G. Breiland, M. E. Coltrin, and R. P. Pawlowski, Appl. Phys. Lett. 81, 2626 (2002).
17. J. R. Creighton, G. T. Wang, W. G. Breiland, and M. E. Coltrin, J. Cryst. Growth 261, 204 (2004).
18. J. R. Creighton, G. T. Wang, and M. E. Coltrin, J. Cryst. Growth 298, 2 (2007).
19. A. V. Lobanova, K. M. Mazaeva, R. A. Talalaev, M. Leysc, S. Boeykensc, K. Cheng, and S. Degroote, J. Cryst. Growth 287, 601 (2006).
20. R. A. Talalaev, E. V. Yakovlev, S. Yu. Karpov, I. Yu. Evstratov, A. N. Vorobev, and Yu. N. Makarov, Phys. Status Solidi A 176, 253 (1999).
21. H. C. van de Hulst, Light Scattering by Small Particles (Dover, New York 1981), p. 146.
22. C. F. Bohren and D. R. Huffmann, Absorption and Scattering of Light by Small Particles (Wiley-Interscience, New York, 1983).
23. J. N. Hodgson, Philos. Mag. 7 (74), 229 (1962).
24. R. T. Shamrell and C. Parman, Opt. Mater. (Amsterdam, Neth.) 13, 289 (1999).