New thin-film humidity and thermal micro-sensor with Al/SrNbxTi1-xO3/SiO2/Si structure

Sensors and Actuators, A: Physical

Volumn 75, Issue 1, 1999, Pages 70-74

  Li, G Q ^a   Lai, P T ^b   Zeng, S H ^a   Huang, M Q ^a   Li, B ^b  

^a SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ATMOSPHERIC HUMIDITY; CAPACITORS; DESORPTION; RESISTORS; SEMICONDUCTOR DEVICE STRUCTURES; SENSITIVITY ANALYSIS; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS; SUBSTRATES; TEMPERATURE MEASUREMENT; THIN FILM DEVICES;

METAL-INSULATOR-SEMICONDUCTOR (MIS) CAPACITORS; STRONTIUM TITANATE-NIOBATE THIN FILMS; THIN FILM RESISTORS;

MICROSENSORS;

EID: 0032665839     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00052-7     Document Type: Article

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