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Volumn 8, Issue 3, 2008, Pages 455-463

Reliability evaluation for copper/low-k structures based on experimental and numerical methods

Author keywords

Bump shear simulation; Copper low k structure; Finite element (FE) modeling; Reliability; Solder

Indexed keywords

BRAZING; LEAD; LEAD ALLOYS; MODEL STRUCTURES; NUMERICAL METHODS; RELIABILITY; SILVER; SOLDERING ALLOYS; TIN; WELDING;

EID: 54949114745     PISSN: 15304388     EISSN: 15304388     Source Type: Journal    
DOI: 10.1109/TDMR.2008.2002345     Document Type: Article
Times cited : (7)

References (14)
  • 1
    • 1842740245 scopus 로고    scopus 로고
    • Effect of low-k dielectric on stress and stress-induced damage in Cu interconnects
    • J. M. Paik, H. Park, and Y. C. Joo, "Effect of low-k dielectric on stress and stress-induced damage in Cu interconnects," Microelectron. Eng., vol. 71, no. 3/4, pp. 348-357, 2004.
    • (2004) Microelectron. Eng , vol.71 , Issue.3-4 , pp. 348-357
    • Paik, J.M.1    Park, H.2    Joo, Y.C.3
  • 2
    • 0742303701 scopus 로고    scopus 로고
    • Impact of flip-chip packaging on copper/low-k structures
    • Nov
    • L. L. Mercado, S. M. Kuo, C. Goldberg, and D. Frear, "Impact of flip-chip packaging on copper/low-k structures," IEEE Trans. Adv. Packag., vol. 26, no. 4, pp. 433-440, Nov. 2003.
    • (2003) IEEE Trans. Adv. Packag , vol.26 , Issue.4 , pp. 433-440
    • Mercado, L.L.1    Kuo, S.M.2    Goldberg, C.3    Frear, D.4
  • 4
    • 20344395335 scopus 로고    scopus 로고
    • Chip-packaging interaction: A critical concern for Cu/low-k packaging
    • Jul./Aug
    • G. Wang, P. S. Ho, and S. Groothuis, "Chip-packaging interaction: A critical concern for Cu/low-k packaging," Microelectron. Reliab., vol. 45, no. 7/8, pp. 1079-1093, Jul./Aug. 2005.
    • (2005) Microelectron. Reliab , vol.45 , Issue.7-8 , pp. 1079-1093
    • Wang, G.1    Ho, P.S.2    Groothuis, S.3
  • 7
    • 0037002232 scopus 로고    scopus 로고
    • Wire bonding to advanced copper, low-k integrated circuits, the metal/dielectric stacks, and materials considerations
    • Dec
    • G. G. Harman and C. E. Johnson, "Wire bonding to advanced copper, low-k integrated circuits, the metal/dielectric stacks, and materials considerations," IEEE Trans. Compon. Packag. Technol., vol. 25, no. 4, pp. 677-683, Dec. 2002.
    • (2002) IEEE Trans. Compon. Packag. Technol , vol.25 , Issue.4 , pp. 677-683
    • Harman, G.G.1    Johnson, C.E.2
  • 8
    • 0141843695 scopus 로고    scopus 로고
    • Determination of the hardness and elastic modulus of low-k thin films and their barrier layer for microelectronic applications
    • L. Shen, K. Zeng, Y. Wang, B. Narayanan, and R. Kumar, "Determination of the hardness and elastic modulus of low-k thin films and their barrier layer for microelectronic applications," Microelectron. Eng., vol. 70, no. 1, pp. 115-124, 2003.
    • (2003) Microelectron. Eng , vol.70 , Issue.1 , pp. 115-124
    • Shen, L.1    Zeng, K.2    Wang, Y.3    Narayanan, B.4    Kumar, R.5
  • 11
    • 1542610644 scopus 로고    scopus 로고
    • Integrating thick copper/block diamond layer in CMOS interconnect process for RF passive components
    • L. Guo, Y. Zhang, and Y. J. Su, "Integrating thick copper/block diamond layer in CMOS interconnect process for RF passive components," Microelectron. Reliab., vol. 44, no. 4, pp. 581-585, 2004.
    • (2004) Microelectron. Reliab , vol.44 , Issue.4 , pp. 581-585
    • Guo, L.1    Zhang, Y.2    Su, Y.J.3
  • 12
    • 0036236607 scopus 로고    scopus 로고
    • Analysis on solder ball shear testing conditions with a simple computational model
    • S. W. R. Lee and X. Huang, "Analysis on solder ball shear testing conditions with a simple computational model," Solder. Surf. Mt. Technol., vol. 14, no. 1, pp. 45-48, 2002.
    • (2002) Solder. Surf. Mt. Technol , vol.14 , Issue.1 , pp. 45-48
    • Lee, S.W.R.1    Huang, X.2
  • 14
    • 7244246988 scopus 로고    scopus 로고
    • Packaging of copper/low-k IC devices: A novel direct fine pitch gold wire bond ball interconnects onto copper/low-k terminal pads
    • Aug
    • S. Chungpaiboonpatana and F. G. Shi, "Packaging of copper/low-k IC devices: A novel direct fine pitch gold wire bond ball interconnects onto copper/low-k terminal pads," IEEE Trans. Adv. Packag., vol. 27, no. 3, pp. 476-489, Aug. 2004.
    • (2004) IEEE Trans. Adv. Packag , vol.27 , Issue.3 , pp. 476-489
    • Chungpaiboonpatana, S.1    Shi, F.G.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.