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Volumn 45, Issue 7-8, 2005, Pages 1079-1093

Chip-packaging interaction: A critical concern for Cu/low k packaging

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COPPER; CRACK INITIATION; DELAMINATION; EUTECTICS; FINITE ELEMENT METHOD; FLIP CHIP DEVICES; INTERFEROMETRY; MOIRE FRINGES; PHASE SHIFT; STRESS CONCENTRATION; SURFACE CHEMISTRY; THERMAL STRESS;

EID: 20344395335     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2004.12.008     Document Type: Article
Times cited : (105)

References (24)
  • 2
    • 20344368650 scopus 로고    scopus 로고
    • PhD thesis. The University of Texas at Austin
    • Du Y. PhD thesis. The University of Texas at Austin; 2001.
    • (2001)
    • Du, Y.1
  • 5
    • 23844434586 scopus 로고    scopus 로고
    • Comprehensive reliability evaluation of a 90 nm CMOS technology with Cu/PECVD low-k BEOL
    • Edelstein D et al. Comprehensive reliability evaluation of a 90 nm CMOS technology with Cu/PECVD low-k BEOL. In: Proc 42th IRPS, 2004.
    • (2004) Proc 42th IRPS
    • Edelstein, D.1
  • 6
    • 8644274781 scopus 로고    scopus 로고
    • Chip-to-package interaction for a 90 nm Cu/PECVD low-k technology
    • Landers W, et al. Chip-to-package interaction for a 90 nm Cu/PECVD low-k technology. In: Proc IITC 2004. p. 108-10.
    • (2004) Proc IITC , pp. 108-110
    • Landers, W.1
  • 8
  • 10
    • 0027662512 scopus 로고
    • Solder ball connect (SBC) assemblies under thermal loading: I. Deformation measurement via Moiré interferometry, and its interpretation
    • Y. Guo, C.K. Lim, W.T. Chen, and C.G. Woychik Solder ball connect (SBC) assemblies under thermal loading: I. Deformation measurement via Moiré interferometry, and its interpretation IBM J Res Develop 37 1993 635 648
    • (1993) IBM J Res Develop , vol.37 , pp. 635-648
    • Guo, Y.1    Lim, C.K.2    Chen, W.T.3    Woychik, C.G.4
  • 13
    • 0024301167 scopus 로고
    • Sandwich test specimens for measuring interface crack toughness
    • Z. Suo, and J.W. Hutchinson Sandwich test specimens for measuring interface crack toughness Mater Sci Eng A 107 1989 135 143
    • (1989) Mater Sci Eng a , vol.107 , pp. 135-143
    • Suo, Z.1    Hutchinson, J.W.2
  • 16
    • 84961718575 scopus 로고    scopus 로고
    • A simulation method for predicting packaging mechanical reliability with low k dielectrics
    • Mercado L, Goldberg C, Kuo S. A simulation method for predicting packaging mechanical reliability with low k dielectrics. In: Proc int interconnect tech conf, 2002.
    • (2002) Proc Int Interconnect Tech Conf
    • Mercado, L.1    Goldberg, C.2    Kuo, S.3
  • 17
    • 0037674766 scopus 로고    scopus 로고
    • Effect of packaging on interfacial cracking in Cu/low k damascene structures
    • Wang G, Groothuis S, Ho PS. Effect of packaging on interfacial cracking in Cu/low k damascene structures. In: ECTC, 2003.
    • (2003) ECTC
    • Wang, G.1    Groothuis, S.2    Ho, P.S.3
  • 19
    • 0003287633 scopus 로고
    • 2D- and 3D-applications of the improved and generalized Modified Crack Closure Integral Method
    • S.N. Atluri G. Yagawa Springer-Verlag New York
    • F.G. Bucholz, R. Sistla, and T. Krishnamurthy 2D- and 3D-applications of the improved and generalized Modified Crack Closure Integral Method S.N. Atluri G. Yagawa Computational Mechanics'88 1988 Springer-Verlag New York
    • (1988) Computational Mechanics'88
    • Bucholz, F.G.1    Sistla, R.2    Krishnamurthy, T.3
  • 20
    • 84950129368 scopus 로고    scopus 로고
    • Thermal deformation analysis on flip-chip packages using high resolution Moiré interferometry
    • Wang G, Zhao J-H, Ding M, Ho P. Thermal deformation analysis on flip-chip packages using high resolution Moiré interferometry. In: Itherm 2002.
    • Itherm 2002
    • Wang, G.1    Zhao, J.-H.2    Ding, M.3    Ho, P.4
  • 21
    • 20344405044 scopus 로고    scopus 로고
    • PhD thesis, The University of Texas at Austin
    • Wang G. PhD thesis, The University of Texas at Austin; 2004.
    • (2004)
    • Wang, G.1
  • 22
    • 84961734442 scopus 로고    scopus 로고
    • Effects of dielectric material and linewidth on thermal stresses of Cu line structures
    • Gan D et al. Effects of dielectric material and linewidth on thermal stresses of Cu line structures. In: Proc int interconnect tech conf, 2002.
    • (2002) Proc Int Interconnect Tech Conf
    • Gan, D.1
  • 23
    • 0037666297 scopus 로고    scopus 로고
    • Low dielectric constant materials for microelectronics
    • K. Maex Low dielectric constant materials for microelectronics J Appl Phys 93 2003 8793 8841
    • (2003) J Appl Phys , vol.93 , pp. 8793-8841
    • Maex, K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.