Spectroscopic diagnostics of pulsed microwave plasmas used for nanocrystalline diamond growth

Chemical Vapor Deposition

Volumn 14, Issue 7-8 SPEC. ISS., 2008, Pages 173-180

  Bénédic, Fabien ^a   Duten, Xavier ^a   Syll, Ousmane ^a,b   Lombardi, Guillaume ^a   Hassouni, Khaled ^a   Gicquel, Alix ^a  

^a UNIVERSITÉ PARIS 13   (France)

^b SORBONNE UNIVERSITÉ   (France)

Author keywords

Microwave plasma; Nanocrystalline diamond; Pulsed mode; Spectroscopy

Indexed keywords

ABSORPTION; ABSORPTION SPECTROSCOPY; CARBON NANOTUBES; CHEMISTRY; DENSITY OF GASES; DIAMOND FILMS; DIAMONDS; DISCHARGE (FLUID MECHANICS); ELECTROMAGNETIC WAVES; EMISSION SPECTROSCOPY; GAS ABSORPTION; GASES; MICROWAVE GENERATION; MICROWAVE POWER TRANSMISSION; MICROWAVES; NANOCRYSTALLINE ALLOYS; NANOCRYSTALLINE MATERIALS; NANOSTRUCTURED MATERIALS; PLASMA DEPOSITION; PLASMAS;

BROADBAND ABSORPTION SPECTROSCOPIES; C ATOMS; CONSTANT TIMES; CONTINUOUS; DEPOSITION PROCESSES; DUTY-CYCLE; FAST IMAGING; GAS TEMPERATURES; GROWTH PROCESSES; MICROWAVE DISCHARGES; MICROWAVE PLASMA; MICROWAVE POWERS; MICROWAVE PULSES; NANOCRYSTALLINE DIAMOND; NANOCRYSTALLINE DIAMOND FILMS; NANOCRYSTALLINE DIAMONDS; PLASMA CHARACTERISTICS; PLASMA CHEMISTRIES; PLASMA COMPOSITIONS; PLASMA DISCHARGES; PLASMA IGNITIONS; PLASMA VOLUMES; PULSE REPETITION RATES; PULSED MICROWAVE PLASMAS; PULSED MODE; PULSED MODES; PULSED PROCESSES; RADIAL PROFILES; SPECIES DENSITIES; TIME EVOLUTIONS; TIME-RESOLVED; TOTAL DENSITIES;

ELECTRIC DISCHARGES;

EID: 54949094709     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.200706658     Document Type: Article

References (29)

1. P. Bruno, F. Bénddié, F. Mohasseb, G. Lombardi, F. Silva, K. Hassouni, J. Phys. D: Appl Phys. 2004, 37, L35.
2. K. Hassouni, X. Duten, A. Rousseau, A. Gicquel, Plasma Sources Sci. Technol. 2001, 10, 61.
3. G. Lombardi, X. Duten, K. Hassouni, A. Rousseau, A. Gicquel, J. Electrochem. Soc. 2003, 150, 311.
4. D. Monéger, F. Bénédic, R. Azouani, F. Chelibane, O. Syll, F. Silva, A. Gicquel, Diamond Relat. Mater. 2007, 16, 1295.
5. Y. Liu, C. Liu, Y. Chen, T. Tzeng, P. Tso, I. Lin, Diamond Relat. Mater. 2004, 13, 671.
6. K. Hassouni, F. Mohasseb, F. Bénédic, G. Lombardi, A. Gicquel, Pure Appl. Chem. 2006, 78, 1127.
7. D. M. Gruen, Annu. Rev. Mater. Sci. 1999, 29, 211.
8. F. Bénédic, M. B. Assouar, P. Kirsch, D. Monéger, O. Brinza, O. Elmazria, P. Alnot, A. Gicquel, Diamond Relat. Mater. 2007. DOI: 10.1016/j.diamond.2007.10.015.
9. A. Gicquel, K. Hassouni, Y. Breton, M. Chenevier, J. C. Cubertafon, Diamond Relat. Mater. 1996, 5, 366.
10. D. M. Gruen, P. C. Redfern, D. A. Horner, P. Zapol, L. A. Curtiss, J. Phys. Chem. B 1999, 103, 5459.
11. J. R. Raheau, P. John, J. I. B. Wilson, Y. Fan, J. Appl. Phys. 2004, 96, 6724.
12. P. W. May, J. N. Harvey, J. A. Smith, Y. A. Mankelevich, J. Appl. Phys. 2006, 99, 104907.
13. P. W. May, Y. A. Mankelevich, J. Appl. Phys. 2006, 100, 024301.
14. P. W. May, M. N. R. Ashfold, Y. A. Mankelevich, J. Appl. Phys. 2007, 101, 053115.
15. E. A. Ballik, D. A. Ramsay, J. Chem. Phys. 1959, 31, 1128.
16. K. Hassouni, T. Grotjohn, A. Gicquel, J. Appl. Phys. 1999, 86, 134.
17. P. Bruno, F. Bénédic, A. Tallaire, F. J. Oliveira, M. S. Amaral, A. J. Fernandes, G. Cicala, R. F. Silva, Diamond Relat. Mater. 2005, 14, 432.
18. G. Lombardi, G. D. Stancu, F. Hempel, A. Gicquel, J. Ropcke, Plasma Sources Sci. Technol. 2004, 13, 27.
19. K. L. Mennigen, M. A. Child, H. Toyoda, Y. Ueda, L. W. Anderson, J. E. Lawler. Contrib. Plasma Phys. 1995, 35, 4.
20. M. Martin, J. Photochem. Photobiol. A: Chem. 1992, 66, 263.
21. C. F. Chabalowski, S. D. Peycrimhoff, Chem. Phys. 1983, 81, 57.
22. A. N. Goyette, T. Matsuda, L. W. Anderson, J. E. Lawler, J. Vac. Sci. Technol. A 1998, 16, 337.
23. X. Duten, A. Rousseau, A. Gicquel, K. Hassouni, P. Leprince, J. Phys. D: Appl. Phys. 2002, 35, 1939.
24. G. Lombardi, F. Bénédic, F. Mohasseb, K. Hassouni, A. Gicquel, Plasma Sources Sci. Technol. 2004, 13, 375.
25. G. Lombardi, K. Hassouni, F. Bénédic, F. Mohasseb, J. Röpcke, A. Gicquel, J. Appl. Phys. 2004, 96, 6739.
26. X. Duten, PhD thesis, Université Paris-Sud, 2000.
27. F. Bénédic, G. Lombardi, K. Hassouni, F. Mohasseb, A. Gicquel, Plasma Assisied Synthesis: Plasma Experimental Diagnostics and Modeling, in Ultra-Nanocrystalline Diamond: Synthesis, Properties and Applications (Eds: O. A. Shenderova, D. M. Gruen), William Andrew Publishing, 2006, pp. 185-228.
28. A. N. Goyette, J. E. Lawler, L. W. Anderson, D. M. Gruen, T. G. McCauley, D. Zhou, A. R. Krauss, J. Phys. D:Appl. Phys. 1998, 31, 1975.
29. A. N. Goyette, J. E. Lawler, L. W. Anderson, D. M. Gruen, T. G. McCauley, D. Zhou, A. R. Krauss, Plasma Sources Sci. Technol. 1998, 7, 149.