Quantitative detection of methyl radicals in non-equilibrium plasmas: A comparative study

Plasma Sources Science and Technology

Volumn 13, Issue 1, 2004, Pages 27-38

  Lombardi, G ^a   Stancu, G D ^b   Hempel, F ^b   Gicquel, A ^a   Ropcke J ^b  

^a UNIVERSITÉ PARIS 13   (France)

^b Inst Niedertemp Plasmaphys G   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

NON-EQUILIBRIUM PLASMAS;

ABSORPTION SPECTROSCOPY; CHEMICAL ANALYSIS; CHEMICAL REACTORS; FREE RADICALS; GROUND STATE; LASER TUNING; METHANOL; SEMICONDUCTOR LASERS;

PLASMAS;

EID: 1642403114     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/13/1/004     Document Type: Article

References (72)

1. Herzberg G and Shoosmith J 1956 Can. J. Phys. 34 523
2. Herzberg G 1961 Proc. R. Soc. A 262 291
3. Tan L Y, Winer A M and Pimentel G C 1972 J. Chem. Phys. 57 4028
4. Yamada C, Hirota E and Kawaguchi K 1981 J. Chem. Phys. 75 5256
5. Amano T, Bernath P F, Yamada C, Endo Y and Hirota E 1982 J. Chem. Phys. 77 5284
6. Yamada C and Hirota E 1983 J. Chem. Phys. 78 669
7. Laguna G A and Baughcum S L 1982 Chem. Phys. Lett. 88 568
8. Celii F G, Pehrsson P E, Wang H-T and Butler J E 1988 Appl. Phys. Lett. 52 2043
9. Bethardy G A and Macdonald R G 1995 J. Chem. Phys. 103 2863
10. Bethardy G A, Northrup F J and Macdonald R G 1996 J. Chem. Phys. 105 5433
11. Davidson D F, Di Rosa M D, Chang E J and Hanson R K 1995 J. Quant. Spectrosc. Radiat. Transfer 53 581
12. Fairbrother D H, Briggman K A, Dickens K A, Stair P C and Weitz E 1997 Rev. Sci. Instrum. 68 2031
13. Robinson G N, Zahniser M S, Freedman A and Nelson D D Jr 1996 J. Mol. Spectrosc. 176 337
14. Takayanagi T 1996 J. Chem. Phys. 104 2237
15. Zarrabian M, Leteinturier C and Turban G 1998 Plasma Sources Sci. Technol 7 607
16. Sugai H, Kojima H, Ishida A and Toyoda H 1990 Appl. Phys. Lett. 56 2616
17. Sugai H and Toyoda H 1992 J. Vac. Sci. Technol. A 8 1193
18. Schmidt M, Foest R and Basner R 1998 J. Phys. IV (France) 8 231
19. Celii F G and Butler J E 1992 J. Appl Phys. 71 2877
20. Ando S, Shinohara M and Takayama K 1998 Vacuum 49 113
21. Arthur N L 1986 J. Chem. Soc. Faraday Trans. II 82 331
22. Davidson D F, Chang A Y, Di Rosa M D and Hanson R K 1993 J. Quant. Spectrosc. Radiat. Transfer 49 559
23. Childs M A, Menningen K L, Chevako P, Spellmeyer N W, Anderson L W and Lawler J E 1992 Phys. Lett. A 171 87
24. Menningen K L, Childs M A, Chevako P, Toyoda H, Anderson L W and Lawler J 1993 Chem. Phys. Lett. 204 573
25. Glänzer K, Quack M and Troe J 1977 16th Int. Symp. on Combustion (Pittsburgh, PA: The Combustion Institute) p 949
26. Menningen K L, Childs M A, Toyoda H, Ueda Y, Anderson L W and Lawler J 1995 Contrib. Plasma Phys. 35 359
27. Loh M H and Capelli M A 1997 Appl. Phys. Lett. 70 1052
28. Capelli M A, Owano T G, Giquel A and Duten X 2000 Plasma Chem. Plasma Process. 20 15
29. Zalicki P, Ma Y, Zare R N, Wahl E H, Dadamio J R, Owano T G and Kruger C H 1995 Chem. Phys. Lett. 234 269
30. Zalicki P, Ma Y, Zare R N, Wahl E H, Dadamio J R, Owano T G and Kruger C H 1995 Appl. Phys. Lett. 67 144
31. Wahl E H, Owano T G, Kruger C H, Zalicki P, Ma Y and Zare R N 1997 Diam. Relat. Mater. 6 476
32. Hwang S M, Rabinowitz M J and Gardiner W C 1993 Chem. Phys. Lett. 205 157
33. Wormhoudt J and McCurdy K E 1989 Chem. Phys. Lett. 156 47
34. Wormhoudt J 1990 J. Vac. Sci. Technol. A 8 1722
35. Robinson G N, Zahniser M S, Freedman A and Nelson D D 1996 J. Mol. Spectrosc. 176 337
36. Davies P B and Martineau P M 1992 J. Appl. Phys. 71 6125
37. Davies P B and Martineau P M 1992 Adv. Mater. 4 729
38. Naito S, Ikeda M, Ito N, Hattori T and Goto T 1993 Japan. J. Appl. Phys. 32 5721
39. Naito S, Ito N, Hattori T and Goto T 1995 Japan. J. Appl. Phys. 34 302
40. Kroesen G M W, Den Boer J H W G, Boufendi L, Vivet F, Khouli K, Bouchoule A and De Hoog F J 1996 J. Vac. Sci. Technol. A 14 546
41. Ikeda M, Ito N, Hiramatsu M, Hon M and Goto T 1997 J. Appl. Phys. 82 4055
42. Fan W Y, Knewstubb P F, Käning M, Mechold L, Röpcke J and Davies P B 1999 J. Phys. Chem. A 103 4118
43. Röpcke J, Mechold L, Käning M, Fan W Y and Davies P B 1999 Plasma Chem. Plasma Process. 19 395
44. Busch C, Möller I and Soltwisch H 2001 Plasma Sources Sci. Technol. 10 250
45. Mechold L, Röpcke J, Duten X and Rousseau A 2001 Plasma Sources Sci. Technol. 10 52
46. Schulz-von der Gathen V, Röpcke J, Gans T, Käning M, Lukas C and Döbele H F 2001 Plasma Sources Sci. Technol. 10 530
47. Röpcke J, Revalde G, Osiac M, Li K and Meichsner J 2002 Plasma Chem. Plasma Process. 22 139
48. Ohl A 1998 J. Phys. IV 8 83
49. Ohl A and Röpcke J 1992 Diam. Relat. Mater. I 243
50. Ohl A, Röpcke J and Schleinitz W 1993 Diam. Relat. Mater. 2 298
51. Röpcke J, Ohl A and Schmidt M 1993 J. Analyt. Atomic Spectrom. 8 803
52. Ohl A, Strobel H, Röpcke J, Kammerstetter H, Pries A and Schneider M 1995 Surf. Coat. Technol. 74-75 59
53. Keller D, Schröder K, Husen B and Ohl A 1997 Polym. Preprints 38 1043
54. Lavrov B P, Melnikov A S, Käning M and Röpcke J 1999 Phys. Rev. E 59 3526
55. Osiac M, Lavrov B P and Röpcke J 2002 J. Quant. Spectrosc. Radiat. Transfer 74 471
56. Hempel F, Röpcke J, Pipa A and Davies P B 2003 Mol. Phys. 101 589
57. Gicquel A, Chenevier M, Hassouni K, Tserepi A and Dubus M 1998 J. Appl. Phys. 83 7504
58. Hassouni K, Leroy O, Farhat S and Gicquel A 1998 Plasma Chem. Plasma Process. 18 325
59. Hassouni K, Duten X, Rousseau A and Gicquel A 2001 Plasma Sources Sci. Technol. 10 61
60. Zahniser M S, Nelson D D and Kolb C E 2002 Applied Combustion Diagnostics ed K Kohse-Hoinghaus and J Jeffries (New York: Taylor and Francis) p 648
61. Nelson D D, Shorter J H, McManus J B and Zahniser M S 2002 Appl. Phys. B 75 343
62. Röpcke J, Mechold L, Käning M, Anders J, Wienhold F G, Nelson D and Zahniser M 2000 Rev. Sci. Instrum. 71 3706
63. Hempel F, Davies P B, Loffhagen D, Mechold L and Röpcke J 2003 Plasma Sources Sci. Technol. 12 S98
64. Röpcke J, Käning M and Lavrov B P 1998 J. Phys. IV 8 207
65. Astashkevich S A, Käning M, Käning E, Kokina N V, Lavrov B P, Ohl A and Röpcke J 1996 J. Quant. Spectrosc. Radiat. Transfer 56 725
66. Herzberg G 1989 Molecular Spectra and Molecular Structure Volume II - Infrared and Raman Spectra of Polyatomic Molecules Reprint edn (Malabar, FL: Krieger Publishing Company)
67. Herzberg G 1989 Molecular Spectra and Molecular Structure Volume III - Electronic Spectra and Electronic Structure of Polyatomic Molecules Reprint edn (Malabar, FL: Krieger Publishing Company)
68. Jacox M E 1998 J. Phys. Chem. Ref. Data 27
69. Gicquel A, Hassouni K, Farhat S, Breton Y, Scott C D, Lefebre M and Pealat M 1994 Diam. Relat. Mater. 3 581
70. Gicquel A, Hassouni K, Breton Y, Chenevier M and Cubertafon J C 1996 Diam. Relat. Mater. 5 366
71. Fan W Y 1997 Thesis University of Cambridge
72. Gicquel A, Hassouni K, Owano T, Duten X and Cappella M 1999 6th Int. Symp. on Diamond Material, Honolulu, Electrochemical Society Proc. vol 99-32, p 41