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Thin Solid Films

Volumn 517, Issue 1, 2008, Pages 453-455

Ellipsometric analysis of mixed metal oxides thin films

(5) Buiu, O a Davey, W a Lu, Y a Mitrovic, I Z a Hall, S a

a UNIVERSITY OF LIVERPOOL (United Kingdom)

Author keywords

Chemical oxide; Density; Hafnium silicate; High dielectric constant; Spectroscopic ellipsometry

Indexed keywords

CERAMIC CAPACITORS; DIELECTRIC WAVEGUIDES; ELLIPSOMETRY; HAFNIUM; HAFNIUM COMPOUNDS; OXIDE FILMS; OXIDES; PERMITTIVITY; PROBABILITY DENSITY FUNCTION; SILICATES; SMELTING; SPECTROSCOPIC ELLIPSOMETRY; STOICHIOMETRY; THICK FILMS; THIN FILMS;

CHEMICAL NATURES; CHEMICAL OXIDE; DENSITY; DEPOSITION METHODS; DIELECTRIC CONSTANTS; DIELECTRIC FUNCTIONS; ELLIPSOMETRIC ANALYSES; FILM DENSITIES; HAFNIUM OXIDE FILMS; HAFNIUM OXIDES; HAFNIUM SILICATE; HAFNIUM SILICATE FILMS; HAFNIUM SILICATES; HIGH DIELECTRIC CONSTANT; MIXED METAL OXIDES; OPTICAL; SPECTROSCOPIC ELLIPSOMETRY MEASUREMENTS;

DIELECTRIC MATERIALS;

EID: 54849441614 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2008.08.119 Document Type: Article

Times cited : (24)

References (12)

1
- 14644435802
- Lu Y., Buiu O., Hall S., and Hurley P.K. Microelectron. Reliab 45 5-6 (2005) 965
- (2005) Microelectron. Reliab , vol.45 , Issue.5-6 , pp. 965
- Lu, Y.¹ Buiu, O.² Hall, S.³ Hurley, P.K.⁴

2
- 33748750082
- Buiu O., Lu Y., Mitrovic I.Z., Hall S., Chalker P., and Potter R.J. Thin Solid Films 515 (2006) 623
- (2006) Thin Solid Films , vol.515 , pp. 623
- Buiu, O.¹ Lu, Y.² Mitrovic, I.Z.³ Hall, S.⁴ Chalker, P.⁵ Potter, R.J.⁶

3
- 33846906023
- Buiu O., Lu Y., Hall S., Mitrovic I.Z., Potter R.J., and Chalker P.R. Thin Solid Films 515 (2007) 3772
- (2007) Thin Solid Films , vol.515 , pp. 3772
- Buiu, O.¹ Lu, Y.² Hall, S.³ Mitrovic, I.Z.⁴ Potter, R.J.⁵ Chalker, P.R.⁶

4
- 34247155755
- Mitrovic I.Z., Buiu O., Hall S., Bungey C., Wagner T., Davey W., and Lu Y. Microelectron. Reliab 47 4-5 (2007) 645
- (2007) Microelectron. Reliab , vol.47 , Issue.4-5 , pp. 645
- Mitrovic, I.Z.¹ Buiu, O.² Hall, S.³ Bungey, C.⁴ Wagner, T.⁵ Davey, W.⁶ Lu, Y.⁷

5
- 0023328238
- Sangwal K., and Kucharczyk W. J. Phys. D, Appl. Phys 20 (1987) 522
- (1987) J. Phys. D, Appl. Phys , vol.20 , pp. 522
- Sangwal, K.¹ Kucharczyk, W.²

6
- 14544268556
- Riganese G.-M. Journal der Physik, Cond. Matter 17 (2005) R357
- (2005) Journal der Physik, Cond. Matter , vol.17
- Riganese, G.-M.¹

7
- 0012289206
- Lucovsky G., and Rayner Jr. G.-B. Appl. Phys. Lett 77 18 (2000) 2912
- (2000) Appl. Phys. Lett , vol.77 , Issue.18 , pp. 2912
- Lucovsky, G.¹ Rayner Jr., G.-B.²

8
- 20144388138
- Puurunen R.L., Delabie A., Elshocht S.V., Caymax M., Green M.L., Brijs B., Richard O., Bender H., Conard T., Hoflijk I., Vandervorst W., Hellin D., Vanhaeren D., Zhao C., De Gendt S., and Heyns M. Appl. Phys. Lett 86 (2005) 073116
- (2005) Appl. Phys. Lett , vol.86 , pp. 073116
- Puurunen, R.L.¹ Delabie, A.² Elshocht, S.V.³ Caymax, M.⁴ Green, M.L.⁵ Brijs, B.⁶ Richard, O.⁷ Bender, H.⁸ Conard, T.⁹ Hoflijk, I.¹⁰ Vandervorst, W.¹¹ Hellin, D.¹² Vanhaeren, D.¹³ Zhao, C.¹⁴ De Gendt, S.¹⁵ Heyns, M.¹⁶

9
- 0003998388
- CRC, Florida
- Weast R.C., and Astle M.J. CRC Handbook of Chemistry and Physics (1994), CRC, Florida B-73
- (1994) CRC Handbook of Chemistry and Physics
- Weast, R.C.¹ Astle, M.J.²

10
- 0346291270
- Puurunen R.L. Chem. Vap. Depos 9 (2003) 249
- (2003) Chem. Vap. Depos , vol.9 , pp. 249
- Puurunen, R.L.¹

11
- 34247097018
- Buiu O., Hall S., Engstrom O., Raeissi B., Lemme M., Hurley P.K., and Cherkaoui K. Microelectron. Reliab 47 4-5 (2007) 678
- (2007) Microelectron. Reliab , vol.47 , Issue.4-5 , pp. 678
- Buiu, O.¹ Hall, S.² Engstrom, O.³ Raeissi, B.⁴ Lemme, M.⁵ Hurley, P.K.⁶ Cherkaoui, K.⁷

12
- 54849428369
- O. Buiu, J. Appl. Phys., in preparation.
- O. Buiu, J. Appl. Phys., in preparation.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.