A study of angular effects in focused ion beam milling of water ice

Journal of Micromechanics and Microengineering

Volumn 18, Issue 9, 2008, Pages

  Fu, Jing ^a   Joshi, Sanjay B ^a   Catchmark, Jeffrey M ^b  

^a The Pennsylvania State University   (United States)

^b University Park   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749142340     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/9/095010     Document Type: Article

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