Sputtering rate of micromilling on water ice with focused ion beam in a cryogenic environment

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 3, 2008, Pages 422-429

  Fu, Jing ^a   Joshi, Sanjay B ^a   Catchmark, Jeffrey M ^b  

^a The Pennsylvania State University   (United States)

^b University Park   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL ANALYSIS; CRYOGENIC ENVIRONMENT; CRYOMICROTOME; GALLIUM IONS;

FOCUSED ION BEAMS; MATHEMATICAL MODELS; PARAMETER ESTIMATION; TEMPERATURE DISTRIBUTION; TRANSMISSION ELECTRON MICROSCOPY;

CRYOGENICS;

EID: 42949123129     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2902962     Document Type: Article

References (33)