Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining

Journal of Micromechanics and Microengineering

Volumn 16, Issue 7, 2006, Pages 1207-1214

  Fazal, I ^a   Louwerse, M C ^a   Jansen, H V ^a   Elwenspoek, M C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC POWER UTILIZATION; INTEGRATED CIRCUIT LAYOUT;

ACTUATION MECHANISM; FLOW RATES; INTERMEDIATE STATE; POWER CONSUMPTION;

MICROMACHINING;

EID: 33745092389     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/7/013     Document Type: Article

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