Electron optics for low energy electron microscopy

Physics Procedia

Volumn 1, Issue 1, 2008, Pages 485-504

  Mankos, Marian ^a   Adler, David ^a   Veneklasen, Lee ^c   Munro, Eric ^b  

^a KLA TENCOR CORPORATION   (United States)

^b Munro's Electron Beam Software Ltd   (United Kingdom)

^c NONE

Author keywords

Electron beam inspection system; Electron optics; Low energy electron microscope (LEEM)

Indexed keywords

EID: 54149090480     PISSN: 18753884     EISSN: 18753892     Source Type: Conference Proceeding    
DOI: 10.1016/j.phpro.2008.07.131     Document Type: Conference Paper

References (22)

1. W. Telieps and E. Bauer, Ultramicroscopy 17 (1985) 57.
2. R.M. Tromp and M.C. Reuter, Ultramicroscopy 50 (1993) 171.
3. G.F. Rempfer, W.P. Skoczylas, O. H. Griffith, Ultramicroscopy 36 (1991) 196.
4. R.N. Watts et al., Rev. Sci. Instrum 68 (1997) 3464.
5. I. Mullerova, Scanning 23 (2001) 379.
6. W.D. Meisburger, A.D. Brodie and A.A. Desai, J. Vac. Sci. Technol. B 10 (1992) 2804.
7. M. Miyoshi, Y. Yamazaki, T. Nagai and I. Nagahama, J. Vac. Sci. Technol. B 17 (1999) 2799.
8. M. Mankos et al., J. Vac. Sci. Technol. B 18 (2000) 3010.
9. M. Mankos et al., J. Vac. Sci. Technol. B 19 (2001) 467.
10. G.H. Jansen, J. Appl. Phys. 84 (1998) 4549.
11. M.M. Mkrtchyan, JA. Liddle, S.D. Berger and L.R. Harriott, J. Appl. Phys. 78 (1995) 6888.
12. M. Mankos, A. Sagle, ST. Coyle and A. Fernandez, J. Vac. Sci. Technol. B 19 (2001) 2566.
13. M. Mankos and D. Adler, Ultramicroscopy 93 (2002) 347.
14. V. Kolarik, L.H. Venklasen and M. Mankos, Optik 87 (1991) 1.
15. R. Degenhardt, Ph.D. Dissertation, Technische Hochschule Darmstadt (1992).
16. L. Veneklasen and D.L. Adler; U.S. Patent # 6,586,733, July 1, 2003.
17. D.L. Adler and M. Marcus; U.S. Patent # 6,979,819, December 27, 2005.
18. H. Mayer, J. Appl. Phys 28 (1957) 975.
19. M. Mankos, D.A. Soltz and H.F. Hess, U.S. Patent # 6,936,816, August 30, 2005.
20. M. Mankos, M.R. Scheinfein and J.M. Cowley, Advances in Imaging and Electron Physics 98 (1996) 323.
21. M.R. Scheinfein, J. Unguris, M.H. Kelley, P.T. Pierce, R.J. Celotta, Rev. Sci. Instrum. 61 (1990) 2501.
22. M.S. Alunan, H. Pinkvos, J. Hurst, H. Poppa, G. Marx and E. Bauer, Mat Res. Soc. Symp. Proc. 232 (1991) 125.