Polydimethylsiloxane microlens arrays fabricated through liquid-phase photopolymerization and molding

Journal of Microelectromechanical Systems

Volumn 17, Issue 5, 2008, Pages 1210-1217

  Zeng, Xuefeng ^a   Jiang, Hongrui ^a  

^a Wisconsin Electric Machines and Power Electronics Consortium   (United States)

Author keywords

Hydrophobic hydrophilic boundary; Microlens array; Neumatic control; Photopolymerization; Polydimethylsiloxane (PDMS)

Indexed keywords

ABS RESINS; FLUID MECHANICS; FORMING; LIQUIDS; MICROCHANNELS; MICROLENSES; MICROOPTICS; MOLDING; OPTICAL INSTRUMENT LENSES; PHOTOPOLYMERIZATION; PNEUMATICS; POLYMERIZATION; SILICONES; SURFACE ROUGHNESS;

HYDROPHOBIC-HYDROPHILIC BOUNDARY; MICROLENS ARRAY; NEUMATIC CONTROL; POLYDIMETHYLSILOXANE (PDMS);

PHASE INTERFACES;

EID: 53649107870     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.926139     Document Type: Article

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