Fabrication of concave gratings by curved surface UV-nanoimprint lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 5, 2008, Pages 1690-1695

  Chen, Yung Pin ^a   Lee, Yuet Ping ^a   Chang, Jer Haur ^a   Wang, Lon A ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ABS RESINS; FABRICATION; FORMING; GLASS; PLASTICS FORMING; RESINS; SPIN GLASS; SUBSTRATES; THERMOFORMING;

CONCAVE GRATINGS; CURVED SUBSTRATES; CURVED SURFACES; FIRST ORDERS; HIGH GAS PRESSURE; NANO IMPRINTS; PRESHAPING; RADIUS OF CURVATURE; SPIN COATER; SUB MICRONS; UNIFORM PRESSURE; UV NANO IMPRINT LITHOGRAPHY;

NANOIMPRINT LITHOGRAPHY;

EID: 53349153203     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2968702     Document Type: Article

References (12)

1. Y. J. Xie, Z. Q. A. Lu, F. Y. Li, J. L. Zhao, and Z. C. Weng, Opt. Express 10, 1043 (2002).
2. T. Kita and T. Harada, Appl. Opt. 31, 1399 (1992).
3. C. H. Ko, B. Y. Shew, M. C. Liang, C. C. Lui, and C. K. Lo, 2004 IEEE/LEOS International Conference on Optical MEMS and Their Applications (Optical MEMS 2004), Takamatsu, Kagawa, Japan, 2004 (unpublished), p. 136.
4. D. W. Wilson, P. D. Maker, R. E. Muller, P. Z. Mouroulis, and J. Backlund, Proc. SPIE 5173, 115 (2003).
5. E. Sokolova, B. Kruizinga, and I. Golubenko, Opt. Eng. (Bellingham) 43, 2613 (2004).
6. Y. J. Xie, Z. W. Lu, and F. Y. Li, Opt. Express 12, 1810 (2004).
7. P. Ruchhoeft, J. Vac. Sci. Technol. B 17, 2965 (1999).
8. Y. N. Xia, E. Kim, X. M. Zhao, J. A. Roger, M. Prentiss, and G. M. Whitesides, Science 273, 347 (1996).
9. W. M. Choi and O. O. Park, Nanotechnology 15, 1767 (2004).
10. J. H. Chang, F. S. Cheng, C. C. Chao, Y. C. Weng, S. Y. Yang, and L. A. Wang, J. Vac. Sci. Technol. A 23, 1687 (2005).
11. F. S. Cheng, S. Y. Yang, S. C. Nian, and L. A. Wang, J. Vac. Sci. Technol. B 24, 1724 (2006).
12. H. Gao, H. Tan, W. Zhang, K. Morton, and S. Y. Chou, Nano Lett. 6, 2438 (2006).