Soft mold and gasbag pressure mechanism for patterning submicron patterns onto a large concave substrate

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 4, 2006, Pages 1724-1727

  Cheng, Fang Sung ^a   Yang, Sen Yeu ^a   Nian, Shin Chin ^b   Wang, Lon A ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b DAHAN INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

MOLDS; NANOTECHNOLOGY; PHOTORESISTORS; PRESSURE DISTRIBUTION; PRESSURE REGULATION; SUBSTRATES;

GASBAG PRESSURE (GBP);

VACUUM TECHNOLOGY;

EID: 33746483384     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2209991     Document Type: Article

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