Recent advances in blazed grating fabrication by electron-beam lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5173, Issue , 2003, Pages 115-126

  Wilson, Daniel W ^a   Maker, Paul D ^a   Muller, Richard E ^a   Mouroulis, Pantazis ^a   Backlund, Johan ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Diffraction gratings; Electron beam lithography; Imaging spectrometers

Indexed keywords

BLAZED GRATINGS; COMPACT RECONNAISSANCE IMAGING SPECTROMETER FOR MARS (CRISM); GHOST DIFFRACTION; IMAGING SPECTROMETERS;

APPROXIMATION THEORY; DENSITY (OPTICAL); DIFFUSION; ELECTRON BEAM LITHOGRAPHY; ERROR ANALYSIS; IMAGING SYSTEMS; SPECTROMETERS; WAVEFRONTS;

DIFFRACTION GRATINGS;

EID: 2342461734     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.510204     Document Type: Conference Paper

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