Scanning micro-mirrors: From bar-code-scanning to spectroscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5873, Issue , 2005, Pages 84-94

  Zimmer, F ^a   Grueger, H ^a   Heberer, A ^a   Sandner, T ^a   Wolter, A ^a   Schenk, H ^a  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

MEMS; Micro scanning mirror; MOEMS; Reflection grating; Scanning grating; Spectrometer; Spectroscopy

Indexed keywords

BAR CODES; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; PHOTODIODES; SCANNING; SPECTROSCOPIC ANALYSIS;

MEMS; MICRO SCANNING MIRRORS; MOEMS; REFLECTION GRATING; SCANNING GRATING;

MIRRORS;

EID: 29144516757     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.614895     Document Type: Conference Paper

References (13)

1. K. E: Petersen: "Silicon torsional scanning mirror", IBM Journal of Research and Development, vol. 24, no. 5, pp. 631-637, 1980
2. H. Urey: "Torsional MEMS scanner design for high-resolution scanning display systems", Proc. SPIE vol. 4773, 2002, pp. 27-37
3. H. Miyajima: "MEMS electromagnetic optical scanner for a commercial laser scanning microscope", Proc. SPIE 4985, 2003, pp. 95-105
4. Y.-C. Ko et. al.: "Design and fabrication of eye-type scanning mirror with dual vertical combs for laser display", Proc. IEEE-LEOS Optical MEMS 2004, 2004, pp. 184-185
5. H. Schenk et. al.: "Design and modeling of large deflection micromechanical 1D and 2D scanning mirrors", SPIE Proc. 4178, 18-19. Sept.2000, pp. 320-324
6. H. Schenk et. al.: "A new driving principle for micromechanical torsional actuators", Micro Electro Mechanical Systems 1999, New York, NY: The American Society of Mechanical Engineers ASME, 1999, S.333-338
7. H. Grueger et. al.: "Realization of a spectrometer with micromashined scanning grating", Proc. Photonics West, vol. 4987, San Jose, USA, 2003
8. P. J. Brosens: "Dynamic mirror distortions in optical scanning", Applied optics, vol. 11, pp. 2988-2989, 1972
9. T. Sandner et. al: "Micromechanical scanning mirrors with highly reflective NIR coatings for high power applications", Proc. Photonics West, vol. 5721, San Jose, USA, 2005, pp. 34-42
10. T. Sandner et. al.: "Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range", Proc. Photonic West, vol. 5721, San Jose, USA, 2005, pp. 72-80
11. A. Wolter et. al.: "Applications and requirements for MEMS scanner mirrors", Proc. Photonics West, vol. 5719, San Jose; USA, 2005, pp. 64-75
12. F. Zimmer et. al.: "Development of a NIR micro spectrometer based on a MOEMS scanning grating", Photonics Europe 2004, Strasbourg, France, SPIE vol. 5455, Apr. 2004
13. K.-U. Roscher et. al.: "Low cost projection device with a 2-dimensional resonant micro scanning mirror", Proc. SPIE 5348, Jan 2004, pp. 22-31