Focused ion beam preparation and EFTEM/EELS studies on vanadium nitride thin films;FIB Probenpräparation und EFTEM/EELS-Untersuchungen an dünnen Vanadiumnitridschichten

Praktische Metallographie/Practical Metallography

Volumn 42, Issue 4, 2005, Pages 172-187

  Rogers, Michael ^a   Kothleitner, Gerald ^a   Berendes, Antje ^b   Bock, Wolfgang ^c   Kolbesen, Bernd O ^b  

^a GRAZ UNIVERSITY OF TECHNOLOGY   (Austria)

^b GOETHE UNIVERSITY   (Germany)

^c Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; MILLING (MACHINING); MONOCHROMATORS; NITRIDES; OPTICAL RESOLVING POWER; THERMOANALYSIS; THICKNESS MEASUREMENT; TRANSMISSION ELECTRON MICROSCOPY; VANADIUM COMPOUNDS;

FILM THICKNESS; FOCUSED ION BEAMS (FIB); RESOLUTION SPECTRA; THERMAL PROCESSING;

THIN FILMS;

EID: 17444428077     PISSN: 0032678X     EISSN: None     Source Type: Journal    
DOI: 10.3139/147.100257     Document Type: Article

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