Method for cross-sectional transmission electron microscopy specimen preparation of composite materials using a dedicated focused ion beam system

Microscopy and Microanalysis

Volumn 5, Issue 5, 1999, Pages 365-370

  Yaguchi, Toshie ^a,b   Kamino, Takeo ^b   Ishitani, Tohru ^b   Urao, Ryoichi ^a  

^a IBARAKI UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

Composite materials; Energy dispersive X ray analysis; Focused ion beam; High resolution electron microscopic observation; Lattice image; Liquid metal ion source; Scanning ion microscopic image; Secondary electron image; Transmission electron microscope

Indexed keywords

EID: 0033455689     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927699000203     Document Type: Article

References (6)

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4. Kitano Y, Fujikawa Y, Kamino T, Yaguchi T, Saka H (1995a) TEM observation of micrometer-sized Ni powder particles thinned by FIB cutting technique. J Electron Microsc 44:410-413
5. Kitano Y, Fujikawa Y, Takeshita H, Kamino T, Yaguchi T, Matsumoto H, Koike H (1995b) TEM observation of mechanically alloyed powder particles of Mg-Zn alloy thinned by FIB cutting technique. J Electron Microsc 44:376-383
6. Susnitzky DW, Johnson KD (1998) Focused ion beam (FIB) milling damage formed during TEM sample preparation of silicon. In: Microscopy and Microanalysis Vol. 4, Suppl. 2, Proceedings. Microscopy and Microanalysis '98, Atlanta, Georgia, July 21-16, 1998, pp 656-657