Structure and tribological behaviour of nanoscale multilayer C/Cr coatings deposited by the combined steered cathodic arc/unbalanced magnetron sputtering technique

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 7-13

  Hovsepian, P Eh ^a   Kok, Y N ^a   Ehiasarian, A P ^a   Erdemir, A ^b   Wen, J G ^c   Petrov, I ^c  

^a SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c University of Illinois at Urbana Champaign   (United States)

Author keywords

C Cr coatings; Magnetron sputtering; Multilayer

Indexed keywords

AMORPHOUS MATERIALS; CARBON; CHROMIUM; ELECTROSTATICS; ETCHING; FRICTION; GRAPHITE; ION IMPLANTATION; IRRADIATION; MAGNETRON SPUTTERING; NITROGEN; SOLUBILITY; THIN FILMS; TRIBOLOGY;

C/CR COATINGS; TRIBOLOGICAL BEHAVIOR;

COATINGS;

EID: 1342326380     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.09.009     Document Type: Conference Paper

References (19)

1. Yang S., Teer D.G. Surf. Coat. Technol. 131:2000;412-416.
2. Yang S., Li X., Renevier N.M., Teer D.G. Surf. Coat. Technol. 142-144:2001;85-93.
3. P.Eh. Hovsepian, D.B. Lewis, C. Constable, Q. Luo, Y.N. Kok, W.-D. Münz, Combined Steered Cathodic Arc/Unbalanced Magnetron Grown C/Cr Nanoscale Multilayer Coatings for Tribological Applications, paper presented at 8th PSE, Garmisch, Germany, Surf. Coat. Technol., in press.
4. Wiklund U., Larsson M. Wear. 241:2000;234-238.
5. Münz W.-D., Lewis D.B., Hovsepian P.Eh., Schönjahn C., Ehiasarian A., Smith I.J. Surf. Eng. 17:2001;15-27.
6. Hovsepian P.Eh., Lewis D.B., Münz W.-D. Surf. Coat. Technol. 133-134:2000;166-175.
7. Chu X., Wong M.S., Sproul W.D., Rohde S.L., Barnett S.A. J. Vac. Sci. Technol. A. 10:1992;1604.
8. Barnett S.A., Madan A. Phys. World. 11:1998;45-48.
9. Ullmann J., Baba K., Martin H., Wolf G.K. Surf. Coat. Technol. 74-75:1995;746-753.
10. Lacerda R.G., Hammer P., Freire F.L. Jr., Alvarez F., Marques F.C. Diamond Relat. Mater. 9:2000;796-800.
11. Uglova V.V., Anishchik V.M., Pauleau Y., Kuleshov A.K., Thièry F., Pelletier J., Dub S.N., Rusalsky D.P. Vacuum. 70:2003;181-185.
12. Petrov I., Hultman L., Helmersson U., Sundgren J.-E., Greene J.E. Thin Solid Films. 169:1989;299.
13. Hultman L., Münz W.-D., Musil J., Kadlec S., Petrov I., Greene J.E. J. Vac. Sci. Technol. A. 9:(3):1991;434.
14. J. Neidhart, As. Czigány, I.F. Brunell, L. Hultman, J. Appl. Phys., in press.
15. Münz W.-D., Hauzer F.J.M., Schulze D., Buil B. Surf. Coat. Technol. 49:1991;161.
16. Münz W.-D., Schulze D., Hauzer F.J.M. Surf. Coat. Technol. 50:1992;169.
17. M. Mayer, SIMNRA, a Simulation Program for the Analysis of NRA, RBS and ERDA, Proceedings of the 15th International Conference on the Application of Accelerators in Research and Industry, In: J.L. Duggan, I.L. Morgan (Eds.), Am. Inst. Phys. Conf. Proc. 475, 1999, p. 541.
18. c Materials and Devices by Electron Microscopy. 2000;69-101 Cambridge University Press.
19. T.Y. Lee, J.G. Wen, J.E. Greene, I. Petrov, submitted for publication.