Improvement of mechanical properties of diamond-like carbon film by Ti ion implantation

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Liu, Cui ^a,b   Gou, Wei ^a   Li, Guoqing ^a   Wang, Lige ^a   Mu, Zongxin ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b Shanghai Solar Energy Science and Technology CO Ltd   (China)

Author keywords

DLC films; Ion dose; Mechanical property; Titanium ion implantation

Indexed keywords

ANTI-WEAR; BROAD BEAMS; DLC FILMS; H/E RATIO; HARDNESS AND ELASTIC MODULUS; HIGH CURRENTS; INTERFACE MIXING; INTRINSIC STRESS; ION DOSE; METAL VAPOR VACUUM ARCS; TI ION IMPLANTATION; TITANIUM ION IMPLANTATION;

CARBON FILMS; DIAMOND FILMS; ION BOMBARDMENT; ION IMPLANTATION; MECHANICAL PROPERTIES; TITANIUM; TITANIUM CARBIDE; VACUUM APPLICATIONS; VAPORS;

DIAMOND LIKE CARBON FILMS;

EID: 52049096211     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200730714     Document Type: Conference Paper

References (10)

1. B. Bhushan, Diamond Relat. Mater. 1999, 8(11), 1985.
2. Y. Liu, E. I. Meletis, Surf. Coat. Technol. 2002, 153, 178.
3. Y. Y. Chang, D. Y. Wang, C. H. Chang, W. T. Wu, Surf. Coat. Technol. 2004, 184, 349.
4. J. I. Oñate, F. Alonso, A. García, Thin Solid Films 1998, 317(1-2), 471.
5. T. Xu, J. J. Lu, S. R. Yang, Q. J. Xue, Mater. Sci. Eng. A 2000, 284, 51.
6. E. Mounier, Y. Pauleau, Diamond Relat. Mater. 1997, 6, 1182.
7. C. Liu, G. Q. Li, W. W. Chen, Z. Mu, C. W. Zhang, L. Wang, Thin Solid Films 2005, 475, 279.
8. S. Chowdhury, M. T. Laugier, I. Z. Rahman, J. Mater. Proc. Technol. 2004, 153-154, 804.
9. A. Leyland, A. Matthews, Wear 2000, 246, 1.
10. M. Fyta, P. C. Kelires, J. Non-Cryst. Solids 2000, 266-269, 760.