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Volumn 196, Issue 1-3 SPEC. ISS., 2005, Pages 207-210
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Preparation and properties of metal-containing diamond-like carbon films by magnetron plasma source ion implantation
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Author keywords
DLC; Electrical resistivity; Plasma source ion implantation; Sputtering
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
CARBIDES;
DOPING (ADDITIVES);
ELECTRIC POTENTIAL;
FRICTION;
GLASS;
ION IMPLANTATION;
MAGNETRON SPUTTERING;
PLASMA SOURCES;
SCANNING ELECTRON MICROSCOPY;
SILICON WAFERS;
SUBSTRATES;
TRIBOLOGY;
WEAR RESISTANCE;
X RAY DIFFRACTION ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
FRICTIONAL PROPERTIES;
PLASMA SOURCE ION IMPLANTATION (PSII);
SHEET RESISTIVITY;
SPUTTER SOURCES;
DIAMOND LIKE CARBON FILMS;
DIAMOND COATING;
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EID: 18144381884
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.08.137 Document Type: Article |
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Times cited : (34)
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References (10)
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