Stress evolution of tetrahedral amorphous carbon upon boron incorporation

Scripta Materialia

Volumn 57, Issue 2, 2007, Pages 141-144

  Tan, Manlin ^a   Zhu, Jiaqi ^a   Han, Jiecai ^a   Han, Xiao ^a   Niu, Li ^a   Chen, Wangshou ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Amorphous materials; Mechanical properties; Raman spectroscopy; Residual stress; Thin films

Indexed keywords

BORON; CONCENTRATION (PROCESS); DENSITY (SPECIFIC GRAVITY); ELASTIC MODULI; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; STRESS ANALYSIS; THIN FILMS;

DENSITY REDUCTION; STRESS EVOLUTION;

AMORPHOUS CARBON;

EID: 34247647566     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2007.03.036     Document Type: Article

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