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Journal of Physics D: Applied Physics

Volumn 35, Issue 20, 2002, Pages 2608-2613

Columnar structure of reactively sputtered aluminium nitride films

(4) Chen, Chi San a Hwang, Bing Hwai a Lu, Hong Yang a Hsu, Tzu Chien a

a NATIONAL SUN YAT SEN UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

GRAIN BOUNDARIES; MOLECULAR BEAM EPITAXY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING ALUMINUM COMPOUNDS; SPUTTERING; SURFACES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

COLUMNAR STRUCTURE; RADIOFREQUENCY REACTIVE SPUTTERING METHOD; THIN ALUMINIUM NITRIDE FILMS;

THIN FILMS;

EID: 0037152663 PISSN: 00223727 EISSN: None Source Type: Journal
DOI: 10.1088/0022-3727/35/20/321 Document Type: Article

Times cited : (9)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.