New insight into tantalum pentoxide Metal-Insulator-Metal (MIM) capacitors: Leakage current modeling, self-heating, reliability assessment and industrial applications

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2008, Pages 225-229

  Martinez, V ^a,b   Besset, C ^a   Monsieur, F ^a   Ney, D ^a   Montes L ^b   Ghibaudo, G ^b  

^a STMICROELECTRONICS   (France)

^b IMEP LAHC   (France)

Author keywords

Leakage; MIM capacitor; Reliability; SCLC; Self heating; Tantalum pentoxide; Thermal breakdown

Indexed keywords

EID: 51549111429     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RELPHY.2008.4558891     Document Type: Conference Paper

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