A comparative study of reliability and performance of strain engineering using CESL stressor and mechanical strain

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2008, Pages 306-309

  Lee, Kyong Taek ^a,b,e   Kang, Chang Yong ^a   Yoo, Ook Sang ^a,c,e   Young, Chadwin D ^a   Bersuker, Gennadi ^a   Park, Ho Kyung ^a,d   Lee, Jun Myung ^d   Hwang, Hyung Sang ^d   Lee, Byoung Hun ^a   Lee, Hi Deok ^a,c,e   Jeong, Yoon Ha ^b  

^a SEMATECH   (United States)

^b Pohang University of Science and Technology (POSTECH)   (South Korea)

^c Chungnam National University   (South Korea)

^d Gwangju Institute of Science and Technology (GIST)   (South Korea)

^e UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; NITRIDES; SEMICONDUCTOR QUANTUM DOTS; STRESSES;

HYDROGEN PASSIVATION; RELIABILITY CHARACTERISTICS; RELIABILITY PHYSICS;

PASSIVATION;

EID: 51549104118     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RELPHY.2008.4558902     Document Type: Conference Paper

References (9)

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