X-ray photoelectron spectroscopy energy band alignment of spin-on CoTiO3 high- k dielectric prepared by sol-gel spin coating method

Applied Physics Letters

Volumn 93, Issue 9, 2008, Pages

  Kao, Kuo Hsing ^a   Chuang, Shiow Huey ^b   Wu, Woei Cherng ^a   Chao, Tien Sheng ^a   Chen, Jian Hao ^a   Ma, Ming Wen ^a   Gao, Reui Hong ^c   Chiang, Michael Y ^c  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL UNIVERSITY OF KAOHSIUNG   (Taiwan)

^c NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT; BAND STRUCTURE; COLLOIDS; ELECTRON SPECTROSCOPY; ELECTRON TRAPS; GELATION; GELS; MICROSCOPIC EXAMINATION; MOLECULAR ORBITALS; MOLECULAR SPECTROSCOPY; PHOTOELECTRICITY; PHOTOELECTRON SPECTROSCOPY; PHOTOIONIZATION; PHOTONS; SILICON; SOL-GEL PROCESS; SOL-GELS; SOLS; SPECTRUM ANALYSIS; SPIN COATING;

SPIN-ON;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 51349145595     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2978231     Document Type: Article

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