Spin coating and plasma process for 2.5D integrated photonics on multilayer polymers

Thin Solid Films

Volumn 516, Issue 23, 2008, Pages 8668-8674

  Zebda, A ^a   Camberlein, L ^b   Beche B ^a   Gaviot, E ^b   Beche E ^c   Duval, D ^a   Zyss, J ^d   Jezequel G ^a   Solal, F ^a   Godet, C ^a  

^a UNIVERSITÉ DE RENNES 1   (France)

^b UNIVERSITÉ DU MAINE   (France)

^c IMP UPR CNRS 8521   (France)

^d UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

2.5D micro optical resonators; Energy surface measurements; Integrated photonics; Polymers; PS233; SOG; SU8; Waveguides; Whispering gallery modes

Indexed keywords

LITHOGRAPHY; MULTILAYERS; OPTICAL RESONATORS; PHOTONIC DEVICES; PHOTONICS; PLASMA APPLICATIONS; PLASTIC COATINGS; POLYMERIC GLASS; POLYMERS; SPIN COATING; SPIN GLASS; SURFACE MEASUREMENT; SURFACE TREATMENT; WAVEGUIDES;

ARGON PLASMA TREATMENT; ELECTROMAGNETIC MODES; INTEGRATED PHOTONIC DEVICES; INTEGRATED PHOTONICS; PROCESSING CONDITION; PS233; SINGLE MODE PROPAGATION; SURFACE PLASMA TREATMENT;

WHISPERING GALLERY MODES;

EID: 51249088379     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.04.095     Document Type: Article

References (26)

1. Donval A., Toussaere E., Hierle R., and Zyss J. J. Appl. Phys. 87 (2000) 3258
2. Labbe P., Donval A., Hierle R., Toussaere E., and Zyss J. C.R. Phys. Acad. Sci. 4 3 (2002) 543
3. Bosc D., Grosso P., Hardy I., Assaïd I., Batté T., Haesaert S., and Vinouze B. Opt. Commun. 235 (2004) 281
4. Leclercq J.L., Garrigues M., Letartre X., Seassal C., and Viktorovitch P. J. Micromech. Microeng. 10 (2000) 287
5. Lee H.Y., Letartre X., Leclercq J.L., Viktorovitch P., Konczewicz L., Sadowski M., and Robert J.L. High Pressure Res. 19 (2000) 347
6. Llobera A., Villanueva G., Cadarso V.J., Büttgenbach S., and Plaza J.A. IEEE Photon. Technol. Lett. 18 (2006) 2425
7. Pelletier N., Bêche B., Camberlein L., Grossard N., Polet F., Gaviot E., and Zyss J. IEEE Sens. J. 6 (2006) 565
8. Pelletier N., Bêche B., Tahani N., Zyss J., Camberlein L., and Gaviot E. Sens. Actuators A 135 (2007) 179
9. Zhang J., Tan K.L., and Gongh Q. Polymer Testing 20 (2001) 693
10. Lee G.B., Lin C.H., and Chang G.L. Sens. Actuators A 103 (2003) 165
11. Lin C.H., Lee G.B., Chen S.H., and Chang G.L. Sens. Actuators A 107 (2003) 125
12. Agirregabiria M., Blanco F.J., Berganzo J., Fullaondo A., Zubiaga A.M., Mayora K., and Ruano-López J.M. Electrophoresis 27 (2006) 3627
13. Data sheets of the SU-8 provider, MicroChem Corp., Newton, MA, USA, www.microchem.com.
14. Kim J.S., Kang J.W., and Kim J.J. Jap. J. Appl. Phys. 42 (2003) 1277
15. Bêche B., Pelletier N., Gaviot E., and Zyss J. Opt. Commun. 230 (2004) 91
16. Bêche B., Pelletier N., Gaviot E., Hierle R., Goullet A., Landesman J.P., and Zyss J. Microelectron. J. 37 (2006) 421
17. Lebental M., Lauret J.S., Zyss J., Schmit C., and Bogomolny E. Phys. Rev. A 75 (2007) 033806
18. Scheuer J., and Yariv A. J. Eur. Opt. Soc. 1 (2006) 06007
19. Accuglass T-12 B Siloxane Spin-On-Glass, Honeywell International Company USA.
20. Polymeric silane PS 233, Ugarit Chimie Company, France; or United Chemical CO. Ltd., www.united-chem.com.
21. Bhattacharya S., Gao Y., Korampally V., Othman M.T., Grant S.A., Gangopadhyay K., and Gangopadhyay S. Appl. Surf. Sci. 253 (2007) 4220
22. van Oss C.J. Interfacial forces in aqueous media (1994), Marcel Dekker Inc., New York
23. van Oss C.J., Chaudury M.J.K., and Good R.J. Chem. Rev. 88 (1988) 927
24. Della Volpe C., Maniglio D., Brugnara M., Siboni S., and Morra M. J. Colloid Interface Sci. 271 (2004) 434
25. A. Zebda, H. Sabbah, S. Ababou-Girard, F. Solal, C. Godet, Applied Surf. Sci. (to be published).
26. Chan C.M., Ko T.M., and Hiraoka H. Surf. Sci. Rep. 24 (1996) 1