Mechanics of plasma exposed spin-on-glass (SOG) and polydimethyl siloxane (PDMS) surfaces and their impact on bond strength

Applied Surface Science

Volumn 253, Issue 9, 2007, Pages 4220-4225

  Bhattacharya, Shantanu ^a   Gao, Yuanfang ^b   Korampally, Venumadhav ^b   Othman, M T ^b   Grant, Sheila A ^a   Gangopadhyay, Keshab ^b   Gangopadhyay, Shubhra ^b  

^a UNIVERSITY OF MISSOURI   (United States)

^b University of Missouri   (United States)

Author keywords

ATR FTIR; Bond strength; Contact angle; PDMS; Plasma; SOG

Indexed keywords

BOND STRENGTH (CHEMICAL); CHEMICAL BONDS; CONTACT ANGLE; ORGANIC POLYMERS; PLASMA APPLICATIONS; SILICONES; SURFACE CHEMISTRY;

PLASMA TREATMENT; POLYDIMETHYL SILOXANE (PDMS); SPIN ON GLASS (SOG); WAFER BONDING;

GLASS;

EID: 33846783012     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.09.028     Document Type: Article

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