Conception of optical integrated circuits on polymers

Microelectronics Journal

Volumn 37, Issue 5, 2006, Pages 421-427

  Beche B ^a   Pelletier, N ^b   Gaviot, E ^b   Hierle, R ^c   Goullet, A ^a   Landesman, J P ^a   Zyss, J ^c  

^a INSTITUT DES MATÉRIAUX JEAN ROUXEL   (France)

^b UNIVERSITÉ DU MAINE   (France)

^c LABORATOIRE DE PHOTONIQUE QUANTIQUE ET MOLÉCULAIRE   (France)

Author keywords

Integrated optical circuits; Microphotolithography; Microtechnologies; Spin on glass (SOG); SU 8

Indexed keywords

COMPUTER SOFTWARE; INTERFACES (MATERIALS); MICROSTRUCTURE; OPTICAL WAVEGUIDES; POLYMERS; SILICA;

INTEGRATED OPTICAL CIRCUITS; MICROPHOTOLITHOGRAPHY; MICROTECHNOLOGIES; SPIN ON GLASS (SOG); SU-8;

INTEGRATED CIRCUITS;

EID: 33644772279     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2005.07.003     Document Type: Article

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