Effects of excess PbO and Zr/Ti ratio on microstructure and electrical properties of PZT films

Journal of the American Ceramic Society

Volumn 91, Issue 9, 2008, Pages 2923-2927

  Park, Chee Sung ^a   Lee, Sung Mi ^a   Kim, Hyoun Ee ^a,b  

^a Seoul National University   (South Korea)

^b AMERICAN CERAMIC SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; CRACKS; ELECTRIC PROPERTIES; FERROELECTRIC FILMS; MAGNETRON SPUTTERING; MICROSTRUCTURE; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING LEAD COMPOUNDS; SILICON; STABILITY; STOICHIOMETRY;

CRACK-FREE FILMS; LEAD-ZIRCONATE-TITANATE FILMS; PLATINIZED SILICON; PZT FILMS; RADIO FREQUENCY MAGNETRON SPUTTERING;

OXIDE FILMS;

EID: 51149118648     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2008.02567.x     Document Type: Article

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