Imaging and spectroscopy of individual atoms, clusters and interfaces in electronic materials and devices

Institute of Physics Conference Series

Volumn 179, Issue , 2004, Pages 1-8

  Muller, D A ^a   Grazul, J ^a  

^a School of Operations Research and Industrial Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC MATERIALS; GATE OXIDES; IMAGING FILTERS; SCANNING TUNNELING ELECTRON MICROSCOPY (STEM);

CHARGE CARRIERS; DIELECTRIC MATERIALS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRONIC STRUCTURE; IMAGING TECHNIQUES; INTERFACES (COMPUTER); LEAKAGE CURRENTS; LSI CIRCUITS; MOSFET DEVICES; PERMITTIVITY; SILICA; TRANSMISSION ELECTRON MICROSCOPY;

MATERIALS SCIENCE;

EID: 5044228071     PISSN: 09513248     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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