Optimizing the environment for sub-0.2 nm scanning transmission electron microscopy

Journal of Electron Microscopy

Volumn 50, Issue 3, 2001, Pages 219-226

  Muller, A ^a   Grazul, J ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

Atomic resolution; EELS; Environment; Magnetic fields; Pressure; STEM

Indexed keywords

ARTICLE;

ELECTROMAGNETIC PULSE; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS;

ACQUISITION TIME; ANNULAR DARK-FIELD IMAGING; ATOMIC-RESOLUTION; DISTORTION-FREE; ENVIRONMENT; ENVIRONMENTAL INSTABILITY; MAGNETIC-FIELD; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SCHOTTKY; STEM;

VIBRATIONS (MECHANICAL);

EID: 0034929335     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/jmicro/50.3.219     Document Type: Article

References (11)

1. Practical aspects of atomic resolution imaging and analysis in STEM
2. Simultaneous STEM imaging and electron energy-loss spectroscopy with atomic column sensitivity
3. Atomic-resolution chemical analysis using a scanning transmission electron microscope
4. 3 states of carbon at sub-nanometre spatial resolution
5. The electronic structure at the atomic scale of ultrathin gate oxides
6. Gate dielectric metrology using advanced TEM measurements
7. Towards sub-A electron beams
8. Design and implementation of a site for a 1 angstrom TEM
9. Design of the electron microscope laboratory
10. Installing and operating FEGTEMs
11. Radiant cooling systems