Degradation behavior of Ta2O5 stacks and its dependence on the gate electrode

Microelectronics Reliability

Volumn 48, Issue 8-9, 2008, Pages 1193-1197

  Atanassova, E ^a   Stojadinovic, N ^b   Paskaleva, A ^a  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^b UNIVERSITY OF NI   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

SULFATE MINERALS;

DEGRADATION BEHAVIOR;

TANTALUM;

EID: 50349093048     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2008.07.006     Document Type: Article

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