Nickel stamp fabrication and hot embossing for mass-production of micro/nano combined structures using anodic aluminum oxide

Microsystem Technologies

Volumn 14, Issue 9-11, 2008, Pages 1689-1694

  Park, Jang Min ^a   Kim, Nam Hyo ^a   Lee, Bong Kee ^a   Lee, Kun Hong ^a   Kwon, Tai Hun ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM; ALUMINUM CLADDING; BIOMIMETICS; COST EFFECTIVENESS; ELECTROCHEMISTRY; ELECTROFORMING; ELECTROMETALLURGY; ELECTRON BEAM LITHOGRAPHY; ENGINEERING RESEARCH; EXTREME ULTRAVIOLET LITHOGRAPHY; FORMING; LIGHT METALS; MICROSCOPES; NICKEL; NICKEL ALLOYS; OPTICAL DESIGN; SCANNING ELECTRON MICROSCOPY; TECHNOLOGY; TISSUE ENGINEERING;

ANODIC ALUMINIUM OXIDE; ANODIC ALUMINUM OXIDE; ATOMIC FORCE MICROSCOPE; BIOCHEMICAL ANALYSIS; EXPERIMENTAL OBSERVATIONS; HIGH POTENTIAL; HOT EMBOSSING; HOT EMBOSSING PROCESS; MASS-PRODUCTION; MICRO SYSTEMS; NICKEL ELECTROFORMING; POLY-METHYL METHACRYLATE; RESEARCH FIELDS; SCANNING ELECTRON MICROSCOPE; TEMPLATE FABRICATION; UV-LITHOGRAPHY;

NICKEL OXIDE;

ALUMINUM OXIDE; COST EFFECTIVENESS; ELECTROCHEMISTRY; EMBOSSING; FORMING; HOT FORMING; LIGHT METALS; MICROSTRUCTURE; NICKEL; POLYMETHYL METHACRYLATE; SCANNING ELECTRON MICROSCOPY; TISSUE;

EID: 49949091916     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0504-0     Document Type: Conference Paper

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