High aspect ratio polymer micro/nano-structure manufacturing using nanoembossing, nanomolding and directed self-assembly

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Volumn 2, Issue , 2003, Pages 886-890

  Sitti, M ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Atomic force microscopy; Etching; Hair; Manufacturing; Nanostructures; Polymers; Probes; Rubber; Self assembly; Tunneling

Indexed keywords

ATOMIC FORCE MICROSCOPY; BIOMIMETICS; ELECTRIC FIELDS; ELECTRON TUNNELING; ETCHING; INTELLIGENT MECHATRONICS; MANUFACTURE; NANOSTRUCTURES; POLYMERS; PROBES; RUBBER; RUBBER APPLICATIONS; SELF ASSEMBLY; SILICONES;

ASPECT-RATIO PILLARS; DC ELECTRIC FIELD; DIRECTED SELF-ASSEMBLY; HAIR; HIGH ASPECT RATIO; MICRO/NANOSTRUCTURES; SILICONE RUBBER; SURGICAL ROBOTS;

ASPECT RATIO;

EID: 84879951332     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/AIM.2003.1225459     Document Type: Conference Paper

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