Phase transformation in BN films by nitrogen-protected annealing at atmospheric pressure

Applied Surface Science

Volumn 254, Issue 21, 2008, Pages 7109-7113

  Zhang, Xiaokang ^a   Deng, Jinxiang ^b   Wang, Ling ^b   Wang, Xuyang ^b   Yao, Qian ^b   Chen, Guanghua ^b   He, Deyan ^a  

^a LANZHOU UNIVERSITY   (China)

^b BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Annealing; Boron nitride films; FTIR; Phase transformation

Indexed keywords

ANNEALING; ATMOSPHERIC PRESSURE; BORON NITRIDE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; III-V SEMICONDUCTORS; NITROGEN; PHASE TRANSITIONS; ZINC SULFIDE;

BORON NITRIDE FILMS; CUBIC PHASE; EFFECTIVE TEMPERATURE; FTIR; FTIR SPECTROSCOPY; HEXAGONAL PHASE; REVERSIBLE TRANSFORMATION; ZINC-BLENDE;

CUBIC BORON NITRIDE;

EID: 49549101998     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.05.224     Document Type: Article

References (29)

1. Olszyna A., Konwerska-Hrabowsha J., and Lisicki M. Diamond Relat. Mater. 6 (1997) 617-620
2. Demazeau G. Diamond Relat. Mater. 2 (1993) 197
3. Ven L., Demazeau G., and Etourneau J. Mater. Sci. Eng. B 10 (1991) 149
4. Chen G.H., Zhang X.W., Wang B., Song X., Cui B., and Yan H. Appl. Phys. Lett. 75 (1999) 10
5. Mishima O., Era K., Tanaka J., and Yamaoka S. Appl. Phys. Lett. 53 (1988) 962
6. Wentorf Jr. R.H. J. Chem. Phys. 36 (1962) 1990
7. Yu W.J., Lau W.M., Chan S.P., Liu Z.F., and Zheng Q.Q. Phys. Rev. B 67 (2003) 014108
8. Sachdev H., Haubner R., Nöth H., and Lux B. Diamond Relat. Mater. 6 (1997) 286-292
9. Liu J., Vohra Y.K., Tarvin J.T., and Vagarali S.S. Phys. Rev. B 51 (1995) 8591
10. von der Gönna J., Meurer H.J., and Nover G. Mater. Lett. 33 (1998) 32l-326
11. Britun V.F., Kurdyumov A.V., Borimchuk N.I., Yarosh V.V., and Danilenko A.I. Diamond Relat. Mater. 16 (2007) 267-276
12. Levitas V.I., and Shvedov L.K. Phys. Rev. B 65 (2002) 104109
13. Yang H.S., Iwamoto C., and Yoshida T. J. Appl. Phys. 91 (2002) 6695
14. Hofsäss H., Feldermann H., Eyhusen S., and Ronning C. Phys. Rev. B 65 (2002) 115410
15. Ye J., and Oechsner H. Thin Solid Films 514 (2006) 138-144
16. Ye J., Oechsner H., and Westermeyr S. J. Vac. Sci. Technol. A 19 5 (2001) 2294-2300
17. Zhou X.T., Sham T.K., Chan C.Y., Zhang W.J., Bello I., Lee S.T., and Hofsäss H. J. Appl. Phys. 100 (2006) 014909
18. Mirkarimi P.B., McCarty K.F., and Medlin D.L. Mater. Sci. Eng. R. 21 (1997) 47
19. Ulrich S., Scherer J., Schwan J., Barzen I., Jung K., Scheib M., and Ehrhardt H. Appl. Phys. Lett. 68 (1996) 909
20. Zhang X.W., Zou Y.J., Yan H., Wang B., Chen G.H., and Wong S.P. Mater. Lett. 45 (2000) 111-115
21. Batsanov S.S., Blohina G.E., and Deribas A.A. Zh. Strukt. Khim. 6 (1965) 227
22. Batsanov S.S. Zh. Strukt. Khim. 14 (1973) 83
23. Litvinov D., and Khizroev S. Appl. Phys. Lett. 74 (1999) 955
24. Zhu P.W., Zhao Y.N., Wang B., He Z., Li D.M., and Zou G.T. J. Solid State Chem. 167 (2002) 420-424
25. Mosuang T.E., and Lowther J.E. J. Phys. Chem. Solids 63 (2001) 363
26. Hollemann A.F., and Wiberg E. Lehrbuch der anorganischen Chemic. 101th ed. (1995), Walter de Gruyter & Co., Berlin
27. McKenzie D.R., McFall W.D., Sainty W.G., Davis C.A., and Collins R.E. Diamond Relat. Mater. 2 (1993) 970
28. Mosuang T.E., and Lowther J.E. Phys. Rev. B 66 (2002) 014112
29. Pokropivny A.V. Diamond Relat. Mater. 15 (2006) 1492-1495