On the nucleation of the cubic phase in boron nitride films

Thin Solid Films

Volumn 514, Issue 1-2, 2006, Pages 138-144

  Ye, Jian ^a   Oechsner, Hans ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

Boron nitride films; Electron spectroscopy; Ion assisted deposition; Nucleation and film growth

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; ELLIPSOMETRY; FILM GROWTH; FILMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BOMBARDMENT; NUCLEATION; PHASE TRANSITIONS; SILICON;

BORON NITRIDE FILMS; ION ASSISTED DEPOSITION; LOW ENERGY ELECTRON LOSS SPECTROSCOPY; RADIO FREQUENCY MAGNETRON SPUTTERING;

CUBIC BORON NITRIDE;

EID: 33745924169     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.02.097     Document Type: Article

References (45)

1. Kester D.J., and Messier R. J. Appl. Phys. 72 (1992) 504
2. Tanabe N., and Iwaki M. Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 80/81 (1993) 1349
3. Weber A., Bringmann U., Nikulski R., and Klages C.-P. Surf. Coat. Technol. 60 (1993) 493
4. Friedmann T.A., Mirkarimi P.B., Medlin D.L., McCarty K.F., Klaus E.J., Boehme D.R., Johnsen H.A., Mills M.J., Ottesen D.K., and Barbour J.C. J. Appl. Phys. 76 (1994) 3088
5. Hofsäss H., Feldermann H., Sebastian M., and Ronning C. Phys. Rev., B 55 (1997) 13230
6. Oechsner H. In: Williams P.F. (Ed). Plasma Processing of Semiconductors (1997), Kluwer, Dordrecht 529
7. Ye J., Rothhaar U., and Oechsner H. Surf. Coat. Technol. 105 (1998) 159
8. Boyen H.-G., Deyneka N., Ziemann P., and Banhart F. Diamond Relat. Mater. 11 (2002) 38
9. Bello I., Chan c.Y., Zhang W.J., Chong Y.M., Leung K.M., Lee S.T., and Lifshitz Y. Diamond Relat. Mater. 14 (2005) 1154
10. Lifshitz Y., Kasi S.R., and Rabalais J.W. Phys. Rev. Lett. 62 (1989) 1290
11. McKenzie D.R., Muller D., and Pailthorpe B.A. Phys. Rev. Lett. 67 (1991) 773
12. Reinke S., Kuhr M., and Kulisch W. Diamond Relat. Mater. 3 (1994) 341
13. Robertson J. Diamond Relat. Mater. 5 (1996) 519
14. McKenzie D.R. J. Vac. Sci. Technol., B 11 (1993) 1928
15. McKenzie D.R., McFall W.D., Sainty W.G., Davis C.A., and Collins R.E. Diamond Relat. Mater. 2 (1993) 970
16. Kester D.J., Ailey K.S., Davis R.F., and More K.L. J. Mater. Res. 8 (1993) 1213
17. Medlin D.L., Friedmann T.A., Mirkarimi P.B., Rez P., Mills M.J., and McCarty K.F. J. Appl. Phys. 76 (1994) 295
18. Tsuda O., Yamada Y., Fujii T., and Yoshida T. J. Vac. Sci. Technol., A 13 (1995) 2843
19. Yoshida T. Diamond Relat. Mater. 5 (1996) 501
20. D. Wiescher, Doctorate Thesis, Univ Kaiserslautern 2001.
21. Widany J., Weich F., Kohler T., Porezag D., and Frauenheim T. Diamond Relat. Mater. 5 (1996) 1031
22. Zhou W.-L., Ikuhara Y., and Suzuki T. Appl. Phys. Lett. 67 (1995) 3551
23. Oechsner H., Westermeyr S., and Ye J. Appl. Surf. Sci. 179 (2001) 88
24. Hanke G., Kramer M., and Müller K. Mater. Sci. Forum 54/55 (1990) 207
25. Pease R.S. Acta Crystallogr. 5 (1952) 356
26. Vatel O., Andre E., Chollet F., Dumas P., and Salvan F. J. Vac. Sci. Technol., B 12 (1994) 2037
27. Ichiki T., Amagi S., and Yoshida T. J. Appl. Phys. 79 (1996) 4381
28. Yamada Y., Tatebayashi Y., Tsuda O., and Yoshida T. Thin Solid Films 295 (1997) 137
29. Yamamoto K., Keunecke M., Bewilogua K., Czigany Zs., and Hultman L. Surf. Coat. Technol. 142-144 (2001) 881
30. Keunecke M., Yamamoto K., and Bewilogua K. Thin Solid Films 398-399 (2001) 142.W
31. Möller D., Bouchier O., and Burat V. Surf. Coat. Technol. 45 (1991) 73
32. Khizroev S., and Litvinov D. Appl. Phys. Lett. 79 (2001) 353
33. Weissmantel C., Bewilogua K., Dietrich D., Erler H.-J., Hinneberg H.-J., Klose S., Nowick W., and Reisse G. Thin Solid Films 72 (1980) 19
34. Knotek O., Elsing R., Kramer G., and Jungblut F. Surf. Coat. Technol. 46 (1991) 265
35. Davis C.A. Thin Solid Films 226 (1993) 30
36. McKenzie D.R., McFall W.D., Reisch S., James B.W., Falconer I.S., Boswell R.W., Persing H., Perry A.J., and Durandet A. Surf. Coat. Technol. 78 (1996) 255
37. Bundy F.P., and Wentorf R.H. J. Chem. Phys. 38 (1963) 1144
38. Berman R., and Simon F. Z. Elektrochem. 59 (1955) 333
39. Solozhenko V.L. Thermochem. Acta 218 (1993) 221
40. Sachedev H., Haubner R., Nöth H., and Lux B. Diamond Relat. Mater. 6 (1997) 286
41. Fahy S., Taylor II C.A., and Clarke R. Phys. Rev., B 56 (1997) 12573
42. Djouadi M.A., Mortet V., Khandozhko S., and Bouchier D. Proc. of 7th International Symposium on Trends and Applications of Thin Films (2000), SFV, Paris 216
43. Reinke S., Kuhr M., and Kulisch W. Diamond Relat. Mater. 5 (1996) 508
44. Ye J., Oechsner H., and Westermeyr S. J. Vac. Sci. Technol. A19 (2001) 2294
45. Le Y.K., and Oechsner H. Appl. Phys., A 78 (2004) 681