Effect of substrate surface on the structure and electronic properties of cubic boron nitride films

Journal of Applied Physics

Volumn 100, Issue 1, 2006, Pages

  Zhou, X T ^a   Sham, T K ^a   Chan, C Y ^b   Zhang, W J ^b   Bello, I ^b   Lee, S T ^b   Hofsass H ^c  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^c UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BAND STRUCTURE; ION BEAM ASSISTED DEPOSITION; SURFACE ROUGHNESS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

CUBIC BORON NITRIDE (C-BN) FILMS; MASS-SELECTED ION BEAM DEPOSITION (MSIBD) TECHNIQUE; X-RAY ABSORPTION NEAR-EDGE STRUCTURE;

CUBIC BORON NITRIDE;

EID: 33746214863     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2213349     Document Type: Article

References (31)

1. P. B. Mirkarimi, K. F. McCarty, and D. L. Medlin, Mater. Sci. Eng., R. 21, 47 (1997), and references therein.
2. W. J. Zhang, I. Bello, Y. Lifshitz. and S. T. Lee, MRS Bull. 28, 184 (2003), and references therein.
3. D. M. Gruen, MRS Bull. 23, 32 (1998).
4. X. T. Zhou, Q. Li, F. Y. Meng, I. Bello, C. S. Lee, S. T. Lee, and Y. Lifshitz, Appl. Phys. Lett. 80, 3307 (2002).
5. Y. Lifshitz, Th. Kohler, Th. Frauenheim, I. Gouzmann, A. Hoffman, R. Q. Zhang, X. T. Zhou, and S. T. Lee, Science 297, 1531 (2002).
6. D. J. Kester, K. S. Ailey, and R. F. Davis, Diamond Relat. Mater. 3, 332 (1994).
7. D. V. Shtansky, O. Tsuda, Y. Ikuhara, and T. Yoshida, Acta Mater. 48, 3745 (2000).
8. H. Hofsäss, C. Ronning, U. Griemeier, M. Gross, S. Reinke, and M. Kuhr, Appl. Phys. Lett. 67, 46 (1995).
9. T. Ikeda, Y. Kawate, and Y. Hirai, J. Vac. Sci. Technol. A 8, 3168 (1990).
10. D. R. McKenzie, D. J. H. Cockayne, D. A. Muller, M. Murakawa,S. Miyake, S. Watanabe, and P. Fallen, J. Appl. Phys. 70, 3007 (1991).
11. J. Stöhr, NEXAFS Spectroscopy (Springer, New York, 1992).
12. I. Jimenez, A. F. Jankowski, L. J. Terminello, D. G. J. Sutherland, J. A. Carlisle, G. L. Doll, W. M. Tong, and D. K. Shuh, Phys. Rev. B 55, 12025 (1997).
13. A. Chaiken, L. J. Terminello, J. Wong, G. L. Doll, and C. A. Taylor, Appl. Phys. Lett. 63, 2112 (1993).
14. J. B. MacNaughton et al., Phys. Rev. B 72, 195113 (2005).
15. X. T. Zhou, T. K. Sham, C. Y. Chan, W. J. Zhang, I. Bello, S. T. Lee, F. Heigl, A. Jürgensen, and H. Hofsäss, J. Mater. Res. 21, 147 (2006).
16. H. Hofsäss, H. Binder, T. Klumpp, and E. Recknagel, Diamond Relat. Mater. 3, 137 (1994).
17. H. Hofsäss, C. Ronning, U. Griesmeier, M. Gross, S. Reinke, M. Kuhr, J. Zweck, and R. Fischer, Nucl. Instrum. Methods Phys. Res. B 106, 153 (1995).
18. Y. Chan, S. Eyhuson, X. M. Meng, I. Bello, S. T. Lee, C. Ronning, and H. Hofsäss, Diamond Relat. Mater. 15, 55 (2006).
19. G. D. Meitzner and D. A. Fischer, Microchem. J. 71, 281 (2002).
20. L. Tröger, D. Arvanitis, K. Baberschke, H. Michaelis, U. Grimm, and E. Zschech, Phys. Rev. B 46, 3283 (1992).
21. C. Bostedt, T. van Buuren, T. M. Willey, N. Franco, L. J. Terminello, C. Heske, and T. Möller, Appl. Phys. Lett. 84, 4056 (2004).
22. T. van Buuren, L. N. Dinh, L. L. Chase, W. J. Siekhaus, and L. J. Terminello, Phys. Rev. Lett. 80, 3803 (1998).
23. D. H. Berns, M. A. Capeili, and D. K. Shuh, Diamond Relat. Mater. 6, 1883 (1997).
24. R. A. Rosenberg, P. J. Love, and V. Rehn, Phys. Rev. B 33, 4034 (1986).
25. C. A. Taylor II, S. W. Brown, V. Subramaniam, S. Kidner, S. C. Rand, and R. Clarke, Appl. Phys. Lett. 65, 1251 (1994).
26. H. Hofsäss, H. Feldermann, M. Sebastian, and C. Ronning, Phys. Rev. B 55, 13230 (1997).
27. J. Y. Raty, G. Galli, C. Bostedt, T. W. van Buuren, and L. J. Terminello, Phys. Rev. Lett. 90, 037401 (2003).
28. P. Zhang and T. K. Sham. Phys. Rev. Lett. 90, 245502 (2003).
29. H. C. Choi, S. Y. Bae, W. S. Jang, and J. Park, J. Phys. Chem. B 109, 7007 (2005).
30. T. Hemraj-Benny, S. Banerjee, S. Sambasivan, D. A. Fischer, W. Han, J. A. Misewich, and S. S. Wong, Phys. Chem. Chem. Phys. 7, 1103 (2005).
31. Q. Li, L. D. Marks, Y. Lifshitz, S. T. Lee, and I. Bello, Phys. Rev. B 65, 045415 (2002).