SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 5, 2001, Pages 2294-2300

Effect of substrate temperature and ion bombardment on the formation of cubic boron nitride films: A two-step deposition approach

(3) Ye, J a Oechsner, H a Westermeyr, S a

a Rheinland Pfälzische Technische Universität Kaiserslautern Landau (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DEPOSITION; FILM GROWTH; ION BOMBARDMENT; MAGNETRON SPUTTERING; NITROGEN; NUCLEATION; STOICHIOMETRY; THERMAL EFFECTS; THIN FILMS;

SUBSTRATE TEMPERATURE;

CUBIC BORON NITRIDE;

EID: 0035440973 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1384561 Document Type: Article

Times cited : (24)

References (34)

1
- 0041754964
- (1991) Appl. Phys. Lett. , vol.58 , pp. 2228
- Saitoh, H.¹ Yarbrough, W.A.²

2
- 36448999062
- (1992) J. Appl. Phys. , vol.72 , pp. 504
- Kester, D.J.¹ Messier, R.²

3
- 84955030294
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 2843
- Tsuda, O.¹ Yamada, Y.² Fujii, T.³ Yoshida, T.⁴

4
- 0029208056
- (1995) Thin Solid Films , vol.254 , pp. 65
- Dworschak, W.¹ Jung, K.² Ehrhardt, H.³

5
- 0037513511
- (1997) Phys. Rev. B , vol.55 , pp. 13230
- Hofsäss, H.¹ Feldermann, H.² Sebastian, M.³ Ronning, C.⁴

6
- 0028419960
- (1994) Diamond Relat. Mater. , vol.3 , pp. 341
- Reinke, S.¹ Kuhr, M.² Kulisch, W.³

7
- 0029389523
- (1995) Surf. Coat. Technol. , vol.74-75 , pp. 723
- Reinke, S.¹ Kuhr, M.² Kulisch, W.³

8
- 0028754986
- (1994) Thin Solid Films , vol.253 , pp. 130
- Cardinale, G.F.¹ Mirkarimi, P.B.² McCarty, K.F.³ Klaus, E.J.⁴ Medlin, D.L.⁵ Clift, W.M.⁶ Howitt, D.G.⁷

9
- 0000302511
- (1996) Diamond Relat. Mater. , vol.5 , pp. 519
- Robertson, J.¹

10
- 0000721676
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 1928
- McKenzie, D.R.¹

11
- 0000198022
- (1989) Phys. Rev. Lett. , vol.62 , pp. 1290
- Lifshitz, Y.¹ Kasi, S.R.² Rabalais, J.W.³

12
- 0010005593
- (1991) Phys. Rev. Lett. , vol.67 , pp. 773
- McKenzie, D.R.¹ Muller, D.² Pailthorpe, B.A.³

13
- 0022949804
- edited by J. Mort and F. Jansen (Chemical Rubber, Boca Raton, FL)
- (1986) Plasma Deposited Thin Films , pp. 89
- Angus, J.C.¹ Koidl, P.² Domitz, S.³

14
- 0027608960
- (1993) J. Mater. Res. , vol.8 , pp. 1213
- Kester, D.J.¹ Ailey, K.S.² Davis, R.F.³ More, K.L.⁴

15
- 0028463481
- (1994) J. Appl. Phys. , vol.76 , pp. 295
- Medlin, D.L.¹ Friedmann, T.A.² Mirkarimi, P.B.³ Rez, P.⁴ Mills, M.J.⁵ McCarty, K.F.⁶

16
- 0000623285
- (1996) Diamond Relat. Mater. , vol.5 , pp. 501
- Yoshida, T.¹

17
- 0002691450
- edited by R. Helbig (Vieweg, Braunschweig)
- (1996) Advances in Solid State Physics , vol.35 , pp. 1
- Davis, R.F.¹ Ailey, K.S.² Bremser, M.D.³ Carlson, E.⁴ Kern, R.S.⁵ Kester, D.J.⁶ Perry, W.G.⁷ Tanaka, S.⁸ Weeks, H.⁹

18
- 0032486045
- (1998) Surf. Coat. Technol. , vol.105 , pp. 159
- Ye, J.¹ Rothhaar, U.² Oechsner, H.³

19
- 36049057047
- (1967) Phys. Rev. , vol.155 , pp. 1039
- Gielisse, P.J.¹ Mitra, S.S.² Plendl, J.N.³ Griffis, R.D.⁴ Mansur, L.C.⁵ Marshall, R.⁶ Pascoe, E.A.⁷

20
- 4544350416
- (1966) Phys. Rev. , vol.146 , pp. 543
- Geick, R.¹ Perry, C.H.²

21
- 0001371988
- (1990) Mater. Sci. Forum , vol.54-55 , pp. 207
- Hanke, G.¹ Kramer, M.² Müller, K.³

22
- 0000742072
- (1990) Mater. Sci. Forum , vol.54-55 , pp. 193
- McKenzie, D.R.¹ Sainty, W.G.² Green, D.³

23
- 0032369676
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 736
- Moulard, G.¹ Contoux, G.² Motyl, G.³ Gardet, G.⁴ Courbon, M.⁵

24
- 0002588339
- edited by H. J. Mathieu, B. Reihl, and D. Briggs (Wiley, Chichester)
- (1996) Proceedings of ECASIA '95 , pp. 799
- Westermeyr, S.¹ Haag, M.² Ye, J.³ Oechsner, H.⁴

25
- 36449002692
- (1995) Appl. Phys. Lett. , vol.66 , pp. 2813
- Mirkarimi, P.B.¹ Medlin, D.L.² McCarty, K.F.³ Barbour, J.C.⁴

26
- 0000701773
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 1041
- Park, K.S.¹ Lee, D.Y.² Kim, K.J.³ Moon, D.W.⁴

27
- 0347697325
- (1997) Thin Solid Films , vol.308-309 , pp. 94
- Jankowski, A.F.¹ Hayes, J.P.² Makowiecki, D.M.³ McKernan, M.A.⁴

28
- 0019060771
- (1980) Thin Solid Films , vol.72 , pp. 19
- Weissmantel, C.¹ Bewilogua, K.² Dietrich, D.³ Erler, H.-J.⁴ Hinneberg, H.-J.⁵ Klose, S.⁶ Nowick, W.⁷ Reisse, G.⁸

29
- 0029754149
- (1996) Surf. Coat. Technol. , vol.78 , pp. 255
- McKenzie, D.R.¹ McFall, W.D.² Reisch, S.³ James, B.W.⁴ Falconer, I.S.⁵ Boswell, R.W.⁶ Persing, H.⁷ Perry, A.J.⁸ Durandet, A.⁹

30
- 0031363583
- (1997) Surf. Coat. Technol. , vol.97 , pp. 263
- Reinke, S.¹ Freudenstein, R.² Kulisch, W.³

31
- 0028514659
- (1994) J. Appl. Phys. , vol.76 , pp. 3088
- Friedmann, T.A.¹

32
- 0031166113
- (1997) Surf. Coat. Technol. , vol.92 , pp. 129
- Hahn, J.¹ Richter, F.² Pintaske, R.³ Röder, M.⁴ Schneider, E.⁵ Welzel, T.⁶

33
- 0000607634
- (1997) Appl. Phys. Lett. , vol.71 , pp. 1969
- Litvinov, D.¹ Clarke, R.²

34
- 85001649197
- in press
- Appl. Surf. Sci.
- Oechsner, H.¹ Westermeyr, S.² Ye, J.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.