Formation of periodical microstructures using interference lithography

Experimental Techniques

Volumn 32, Issue 4, 2008, Pages 23-28

  Tamulevicius T ^a,b   Tamulevicius S ^a,b   Andrulevicius M ^b   Griskonis E ^a,b   Puodziukynas L ^a   Janusas G ^a   Guobiene, A ^a,b  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION; DIFFRACTION EFFICIENCY; DIFFRACTION GRATINGS; ELECTRON BEAMS; ELECTRON OPTICS; IMAGING TECHNIQUES; LITHOGRAPHY; MICROSCOPIC EXAMINATION; NICKEL; NICKEL ALLOYS; PARTICLE BEAMS; PHOTORESISTORS; PHOTORESISTS; SCANNING PROBE MICROSCOPY; SULFATE MINERALS; SURFACE TREATMENT;

ELECTRON BEAM EVAPORATION; INTERFERENCE LITHOGRAPHY; MICRORELIEF; NICKEL DEPOSITION; PHASE DIFFRACTION GRATINGS; SCALING FACTORS; SIMULATION RESULTS; SULFAMATE BATHS; VARIATIONS OF;

LIGHT;

EID: 49249109932     PISSN: 07328818     EISSN: 17471567     Source Type: Journal    
DOI: 10.1111/j.1747-1567.2007.00291.x     Document Type: Article

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