Optical characterization of microstructures of high aspect ratio

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6518, Issue PART 3, 2007, Pages

  Tamulevicius, T ^a,b   Tamulevicius, S ^a,b   Andrulevicius, M ^b   Janusas, G ^a   Ostasevicius, V ^a   Palevicius, A ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Diffraction gratings; Micro fluidic device; Relative diffraction efficiency

Indexed keywords

COMPUTER SIMULATION; DIFFRACTION GRATINGS; FLUIDIC DEVICES; MICROFLUIDICS; OPTICAL CHARACTER RECOGNITION; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY;

HIGH ASPECT RATIO; MICRO-FLUIDIC DEVICE; RELATIVE DIFFRACTION EFFICIENCY; SILICON SUBSTRATES;

MICROSTRUCTURE;

EID: 35148884838     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.714245     Document Type: Conference Paper

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