Optical characterization of diffractive optical elements replicated in polymers

Journal of Microlithography, Microfabrication and Microsystems

Volumn 5, Issue 1, 2006, Pages

  Tamulevicius, Sigitas ^a   Guobiene, Asta ^a   Janusas, Giedrius ^b   Palevicius, Arvydas ^b   Ostasevicius, Vytautas ^b   Andrulevicius, Mindaugas ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Diffraction efficiency; Diffractive optical elements; Polymers; Replication

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; DIFFRACTIVE OPTICS; LASER APPLICATIONS; POLYETHYLENE TEREPHTHALATES; POLYMETHYL METHACRYLATES;

DIFFRACTION EFFICIENCY; DIFFRACTIVE OPTICAL ELEMENTS; RELATIVE EFFICIENCY (RE); REPLICATION;

OPTICAL DEVICES;

EID: 33748565295     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2170098     Document Type: Article

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