Laser pulse assisted nanoimprint lithography

Thin Solid Films

Volumn 453-454, Issue , 2004, Pages 13-15

  Grigaliunas, V ^a   Tamulevicius S ^a   Tomasiunas R ^b   Kopustinskas, V ^a   Guobiene, A ^a   Jucius, D ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b VILNIUS UNIVERSITY   (Lithuania)

Author keywords

Laser processing; Nanoimprint lithography

Indexed keywords

ATOMIC FORCE MICROSCOPY; DECOMPOSITION; ETCHING; HEATING; LASER PULSES; NEODYMIUM LASERS; PHOTODETECTORS; PHOTORESISTS; PULSED LASER APPLICATIONS; SILICON;

LASER PULSE EXCITATION; LASER PULSED ASSISTED NANOIMPRINT LITHOGRAPHY;

PLASTIC FILMS;

EID: 1542741585     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.071     Document Type: Conference Paper

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