An electrostatic 2-dimensional micro-gripper for nano structure

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 272-275

  Mita, M ^a   Kawara, H ^a   Toshiyoshi, H ^a   Ataka, M ^a   Fujita, H ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Anisotropic magnetoresistance; Electrostatic actuators; Grippers; Plasma applications; Plasma chemistry; Probes; Scanning electron microscopy; Silicon compounds; Suspensions; Two dimensional displays

Indexed keywords

ACTUATORS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; ENHANCED MAGNETORESISTANCE; GRIPPERS; MICROSYSTEMS; NANOPARTICLES; NANOSENSORS; NANOSTRUCTURES; PLASMA APPLICATIONS; PROBES; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS; SUSPENSIONS (FLUIDS); TRANSDUCERS;

GOLD PARTICLES; MICRO GRIPPER; MICROFABRICATED; PLASMA CHEMISTRIES; TWO-DIMENSIONAL DISPLAYS;

SOLID-STATE SENSORS;

EID: 52249092122     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215305     Document Type: Conference Paper

References (5)

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4. G. Hashiguchi and H. Minura, "Fabrication of Silicon Quantum Wires Using Separation by Implanted Oxygen Wafer", Japanese J. Appl. Phys. Vol. 33, Part 2, No. 12A, 1 Dec 1994, pp. 1649-1650
5. Gen Hashiguchi, et al., "Emission characteristics and in-situ TEM observation of Si lateral field emitters", Proc of the 14th IEEE Vac. Micro,2001, Davis, CA, USA, pp.237-238