Thin-film PZT lateral actuators with extended stroke

Journal of Microelectromechanical Systems

Volumn 17, Issue 4, 2008, Pages 890-899

  Oldham, Kenn R ^a   Pulskamp, Jeffrey S ^b   Polcawich, Ronald G ^b   Dubey, Madan ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

Actuators; Lead zirconate titanate (PZT) ceramics; Piezoelectric devices; Robots

Indexed keywords

ACTUATORS; ELECTROMECHANICAL DEVICES; MANGANESE COMPOUNDS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; PIEZOELECTRIC DEVICES; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS; THICK FILMS; THICKNESS MEASUREMENT; THIN FILM DEVICES; THIN FILMS;

ACTUATION FORCES; ACTUATOR DESIGN; ACTUATOR NONLINEARITY; CHEMICAL-; FILM ACTUATOR; IN-PLANE; LATERAL DISPLACEMENT; LEAD ZIRCONATE TITANATE (PZT) CERAMICS; LEAD ZIRCONATE TITANATE THIN FILMS; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROSCALE DEVICES; PIEZOELECTRIC THIN FILMS; PIEZOELECTRIC UNIMORPH; ROBOTS; STROKE LENGTH; SUB MICROMETERS; WORK CAPACITIES;

PIEZOELECTRIC ACTUATORS;

EID: 49149087188     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.927177     Document Type: Article

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