Model predictive control of nonlinear stochastic partial differential equations with application to a sputtering process

AIChE Journal

Volumn 54, Issue 8, 2008, Pages 2065-2081

  Lou, Yiming ^a,c   Hu, Gangshi ^b   Christofides, Panagiotis D ^b  

^a Advanced Projects Research Inc   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Hamilton Sundstraud United Technologies Corporation   (United States)

Author keywords

Process; Process control; Simulation

Indexed keywords

COMPUTATIONALLY EFFICIENT; DOMINANT MODES; FINITE DIMENSIONAL APPROXIMATIONS; GALERKIN'S METHOD; KINETIC MONTE CARLO MODELING; KURAMOTO-SIVASHINSKY EQUATION; MODEL PREDICTIVE CONTROLLER; NONLINEAR STOCHASTIC ORDINARY DIFFERENTIAL EQUATIONS; PROCESS; PROCESS CONTROL; SIMULATION; SPUTTERING PROCESS; STOCHASTIC PARTIAL DIFFERENTIAL EQUATIONS; THIN-FILM GROWTH;

AIRCRAFT ENGINES; COMPUTATIONAL FLUID DYNAMICS; DIFFERENCE EQUATIONS; DIFFERENTIAL EQUATIONS; DIFFERENTIATION (CALCULUS); EQUATIONS OF STATE; FILM GROWTH; GALERKIN METHODS; IMAGE SEGMENTATION; MODEL PREDICTIVE CONTROL; NONLINEAR EQUATIONS; ORDINARY DIFFERENTIAL EQUATIONS; POLYNOMIAL APPROXIMATION; PREDICTIVE CONTROL SYSTEMS; SPUTTERING; STOCHASTIC MODELS; STOCHASTIC PROGRAMMING; SURFACE ROUGHNESS; THICK FILMS;

PARTIAL DIFFERENTIAL EQUATIONS;

EID: 49049122032     PISSN: 00011541     EISSN: 15475905     Source Type: Journal    
DOI: 10.1002/aic.11511     Document Type: Article

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